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	Microstructural and component evolution of self-assembled nanoperiod multilayered carbon-copper films with deposition pressure 期刊论文 AIP Advances, 2017, 卷号: 7, 期号: 4, 页码: 045108(1-7) 作者: Wang WQ(王伟奇); Ji L(吉利); Li HX(李红轩); Zhao, Yiman; Zhou HD(周惠娣) 收藏 \| 浏览/下载：13/0 \| 提交时间：2017/08/28
	Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi-step deep reactive ion etching process 期刊论文 MICRO & NANO LETTERS, 2017, 卷号: 12, 页码: 482-485 作者: Wang, Wenqiang; Li, Chen; Xu, Wencai; Zou, Helin 收藏 \| 浏览/下载：2/0 \| 提交时间：2019/12/02 microactuators membranes ink jet printing sputter etching silicon elemental semiconductors microactuator membranes piezoelectric inkjet print head multistep deep reactive ion etching process multilayered structures multilayered actuator membranes silicon on insulator wafers notching effect Si SiO2
	Fine-pitch through-silicon via integration with self-aligned back-side benzocyclobutene passivation layer 期刊论文 MICRO & NANO LETTERS, 2016 Guan, Yong; Ma, Shenglin; Zeng, Qinghua; Chen, Jing; Jin, Yufeng 收藏 \| 浏览/下载：3/0 \| 提交时间：2017/12/03 three-dimensional integrated circuits passivation organic compounds sputter etching chemical mechanical polishing radiography optical microscopy scanning electron microscopy vector network analyser four probe electrical measurement scanning electron microscopy optical microscopy X-ray radiographic testing repeatability chemical mechanical polishing plasma etching back side benzocyclobutene passivation layer self aligned benzocyclobutene passivation layer fine pitch thr
	Influence of Ar ion sputter-etching on XPS analysis of Ti-Si-C nanocomposite film 期刊论文 Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering, 2014, 卷号: 43, 期号: 4, 页码: 977-981 作者: Jiang Jinlong; Chen Di; Wang Qiong; Yang Hua; Wei Zhiqiang 收藏 \| 浏览/下载：0/0 \| 提交时间：2020/11/14 Amorphous carbon Argon Etching Nanocomposites Photoelectron spectroscopy Silicon compounds Titanium carbide Titanium compounds X ray photoelectron spectroscopy Bonding configurations Composite target Film surfaces Ion sputter etching Nano-composite structure Sputter etching Unbalanced magnetron sputtering XPS analysis
	Influence of Ar Ion Sputter-Etching on XPS Analysis of Ti-Si-C Nanocomposite Film 期刊论文 RARE METAL MATERIALS AND ENGINEERING, 2014, 卷号: 43, 期号: 4, 页码: 977-981 作者: Jiang Jinlong; Chen Di; Wang Qiong; Yang Hua; Wei Zhiqiang 收藏 \| 浏览/下载：0/0 \| 提交时间：2019/11/15 Ti-Si-C nanocomposite films Ar+ sputter-etching XPS bonding configurations
	氩离子溅射刻蚀对Ti-Si-C纳米复合薄膜XPS分析的影响期刊论文稀有金属材料与工程, 2014, 卷号: 43, 期号: 4, 页码: 977-981 作者: 姜金龙; 陈娣; 王琼; 杨华; 魏智强收藏 \| 浏览/下载：99/0 \| 提交时间：2015/10/26 Ti-Si-C nanocomposite films Ar+ sputter-etching XPS bonding configurations
	Influence of sputter-etching of substrate on the microstructural and optical properties of ZnO films deposited by RF magnetron sputtering 期刊论文 Applied Surface Science, 2011, 卷号: Vol.257 No.14, 页码: 5998-6003 作者: Li, CP; Yang, BH; Wang, XC; Wang, F; Li, MJ 收藏 \| 浏览/下载：4/0 \| 提交时间：2019/11/21
	Improvement of amorphous silicon n-i-p solar cells by incorporating double-layer hydrogenated nanocrystalline silicon structure 期刊论文 journal of non-crystalline solids, 2011, 卷号: 357, 期号: 1, 页码: 121-125 作者: Wang C 收藏 \| 浏览/下载：69/3 \| 提交时间：2011/07/05 Hydrogenated nanocrystalline silicon Buffer layer i/p interface Solar cells OPEN-CIRCUIT VOLTAGE A-SI-H P/I-INTERFACE MICROCRYSTALLINE SILICON VAPOR-DEPOSITION FILMS CAPACITANCE EFFICIENCY CRYSTALLINE TEMPERATURE
	Highly efficient 1.53 mu m luminescence in ErxYb2-xSi2O7 thin films grown on Si substrate 期刊论文 materials letters, 2011, 卷号: 65, 期号: 5, 页码: 860-862 Zheng J; Tao YL; Wang W; Zhang LZ; Zuo YH; Xue CL; Cheng BW; Wang QM 收藏 \| 浏览/下载：65/3 \| 提交时间：2011/07/05 Luminescence Optical materials and properties Sputtering Thin films PHOTOLUMINESCENCE ER3+
	Efficient 1.53 mu m emission and energy transfer in Si/Er-Si-O multilayer structure 期刊论文 materials research bulletin, 2011, 卷号: 46, 期号: 2, 页码: 262-265 作者: Xue CL 收藏 \| 浏览/下载：63/4 \| 提交时间：2011/07/05 Multilayers Inorganic compounds Sputtering Optical properties DOPED SI/SIO2 SUPERLATTICES ERBIUM SILICATE ER3+ LUMINESCENCE FILMS PHOTOLUMINESCENCE

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