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	Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi-step deep reactive ion etching process
	Wang, Wenqiang; Li, Chen; Xu, Wencai; Zou, Helin
刊名	MICRO & NANO LETTERS
	2017
卷号	12页码:482-485
关键词	microactuators membranes ink jet printing sputter etching silicon elemental semiconductors microactuator membranes piezoelectric inkjet print head multistep deep reactive ion etching process multilayered structures multilayered actuator membranes silicon on insulator wafers notching effect Si SiO2
ISSN号	1750-0443
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3284386
专题	大连理工大学
作者单位	1.Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China. 2.Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China. 3.Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Wang, Wenqiang,Li, Chen,Xu, Wencai,et al. Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi-step deep reactive ion etching process[J]. MICRO & NANO LETTERS,2017,12:482-485.
APA	Wang, Wenqiang,Li, Chen,Xu, Wencai,&Zou, Helin.(2017).Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi-step deep reactive ion etching process.MICRO & NANO LETTERS,12,482-485.
MLA	Wang, Wenqiang,et al."Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi-step deep reactive ion etching process".MICRO & NANO LETTERS 12(2017):482-485.

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