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CORC

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Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi-step deep reactive ion etching process 期刊论文
MICRO & NANO LETTERS, 2017, 卷号: 12, 页码: 482-485
作者:  Wang, Wenqiang;  Li, Chen;  Xu, Wencai;  Zou, Helin
收藏  |  浏览/下载：2/0  |  提交时间：2019/12/02
Fine-pitch through-silicon via integration with self-aligned back-side benzocyclobutene passivation layer 期刊论文
MICRO & NANO LETTERS, 2016
Guan, Yong; Ma, Shenglin; Zeng, Qinghua; Chen, Jing; Jin, Yufeng
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Influence of Ar ion sputter-etching on XPS analysis of Ti-Si-C nanocomposite film 期刊论文
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering, 2014, 卷号: 43, 期号: 4, 页码: 977-981
作者:  Jiang Jinlong;  Chen Di;  Wang Qiong;  Yang Hua;  Wei Zhiqiang
收藏  |  浏览/下载：0/0  |  提交时间：2020/11/14
Influence of Ar Ion Sputter-Etching on XPS Analysis of Ti-Si-C Nanocomposite Film 期刊论文
RARE METAL MATERIALS AND ENGINEERING, 2014, 卷号: 43, 期号: 4, 页码: 977-981
作者:  Jiang Jinlong;  Chen Di;  Wang Qiong;  Yang Hua;  Wei Zhiqiang
收藏  |  浏览/下载：0/0  |  提交时间：2019/11/15
氩离子溅射刻蚀对Ti-Si-C纳米复合薄膜XPS分析的影响 期刊论文
稀有金属材料与工程, 2014, 卷号: 43, 期号: 4, 页码: 977-981
作者:  姜金龙;  陈娣;  王琼;  杨华;  魏智强
收藏  |  浏览/下载：100/0  |  提交时间：2015/10/26
Fabrication of (K,Na)NbO/sub 3/ lead-free piezoceramic microrod arrays by sol-gel processing with micromachined silicon templates 期刊论文
2010, 2010
Ying Xu; Dawei Liu; Fengping Lai; Yuhua Zhen; Jing-Feng Li
收藏  |  浏览/下载：4/0
GaN-based blue LEDs with microstructure on p-GaN surface formed by inductively coupled plasma etching 期刊论文
2010, 2010
Zhang Xian-peng; Han Yan-jun; Luo Yi; Xue Xiao-lin; Wang Lai; Jiang Yang
收藏  |  浏览/下载：3/0
Improvement in power durability of Al electrode films used in SAW devices by Zr additive and Ti underlayer 期刊论文
2010, 2010
Dongmei Li; Qiang Li; Pan, F.
收藏  |  浏览/下载：5/0
Gas flow simulation research on reaction chamber of ICP etcher 期刊论文
2010, 2010
Cheng Jia; Zhu Yu
收藏  |  浏览/下载：5/0
Microstructure and electronic properties of Al/Zr/LiNbO/sub 3/ multilayers 会议论文
Materials Science Forum, Fifth Pacific Rim International Conference on Advanced Materials and Processing PRICM-5, Beijing, China, INSPEC
Li, D.M.; Pan, F.; Wang, X.B.; Niu, J.B.; Liu, M.
收藏  |  浏览/下载：5/0

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