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Microstructural and component evolution of self-assembled nanoperiod multilayered carbon-copper films with deposition pressure
期刊论文
AIP Advances, 2017, 卷号: 7, 期号: 4, 页码: 045108(1-7)
作者:
Wang WQ(王伟奇)
;
Ji L(吉利)
;
Li HX(李红轩)
;
Zhao, Yiman
;
Zhou HD(周惠娣)
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2017/08/28
Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi-step deep reactive ion etching process
期刊论文
MICRO & NANO LETTERS, 2017, 卷号: 12, 页码: 482-485
作者:
Wang, Wenqiang
;
Li, Chen
;
Xu, Wencai
;
Zou, Helin
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  |  
浏览/下载:2/0
  |  
提交时间:2019/12/02
microactuators
membranes
ink jet printing
sputter etching
silicon
elemental semiconductors
microactuator membranes
piezoelectric inkjet print head
multistep deep reactive ion etching process
multilayered structures
multilayered actuator membranes
silicon on insulator wafers
notching effect
Si
SiO2
Fine-pitch through-silicon via integration with self-aligned back-side benzocyclobutene passivation layer
期刊论文
MICRO & NANO LETTERS, 2016
Guan, Yong
;
Ma, Shenglin
;
Zeng, Qinghua
;
Chen, Jing
;
Jin, Yufeng
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2017/12/03
three-dimensional integrated circuits
passivation
organic compounds
sputter etching
chemical mechanical polishing
radiography
optical microscopy
scanning electron microscopy
vector network analyser
four probe electrical measurement
scanning electron microscopy
optical microscopy
X-ray radiographic testing
repeatability
chemical mechanical polishing
plasma etching
back side benzocyclobutene passivation layer
self aligned benzocyclobutene passivation layer
fine pitch thr
Influence of Ar ion sputter-etching on XPS analysis of Ti-Si-C nanocomposite film
期刊论文
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering, 2014, 卷号: 43, 期号: 4, 页码: 977-981
作者:
Jiang Jinlong
;
Chen Di
;
Wang Qiong
;
Yang Hua
;
Wei Zhiqiang
收藏
  |  
浏览/下载:0/0
  |  
提交时间:2020/11/14
Amorphous carbon
Argon
Etching
Nanocomposites
Photoelectron spectroscopy
Silicon compounds
Titanium carbide
Titanium compounds
X ray photoelectron spectroscopy
Bonding configurations
Composite target
Film surfaces
Ion sputter etching
Nano-composite structure
Sputter etching
Unbalanced magnetron sputtering
XPS analysis
Influence of Ar Ion Sputter-Etching on XPS Analysis of Ti-Si-C Nanocomposite Film
期刊论文
RARE METAL MATERIALS AND ENGINEERING, 2014, 卷号: 43, 期号: 4, 页码: 977-981
作者:
Jiang Jinlong
;
Chen Di
;
Wang Qiong
;
Yang Hua
;
Wei Zhiqiang
收藏
  |  
浏览/下载:0/0
  |  
提交时间:2019/11/15
Ti-Si-C nanocomposite films
Ar+ sputter-etching
XPS
bonding configurations
氩离子溅射刻蚀对Ti-Si-C纳米复合薄膜XPS分析的影响
期刊论文
稀有金属材料与工程, 2014, 卷号: 43, 期号: 4, 页码: 977-981
作者:
姜金龙
;
陈娣
;
王琼
;
杨华
;
魏智强
收藏
  |  
浏览/下载:99/0
  |  
提交时间:2015/10/26
Ti-Si-C nanocomposite films
Ar+ sputter-etching
XPS
bonding configurations
Influence of sputter-etching of substrate on the microstructural and optical properties of ZnO films deposited by RF magnetron sputtering
期刊论文
Applied Surface Science, 2011, 卷号: Vol.257 No.14, 页码: 5998-6003
作者:
Li, CP
;
Yang, BH
;
Wang, XC
;
Wang, F
;
Li, MJ
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/11/21
Improvement of amorphous silicon n-i-p solar cells by incorporating double-layer hydrogenated nanocrystalline silicon structure
期刊论文
journal of non-crystalline solids, 2011, 卷号: 357, 期号: 1, 页码: 121-125
作者:
Wang C
收藏
  |  
浏览/下载:69/3
  |  
提交时间:2011/07/05
Hydrogenated nanocrystalline silicon
Buffer layer
i/p interface
Solar cells
OPEN-CIRCUIT VOLTAGE
A-SI-H
P/I-INTERFACE
MICROCRYSTALLINE SILICON
VAPOR-DEPOSITION
FILMS
CAPACITANCE
EFFICIENCY
CRYSTALLINE
TEMPERATURE
Highly efficient 1.53 mu m luminescence in ErxYb2-xSi2O7 thin films grown on Si substrate
期刊论文
materials letters, 2011, 卷号: 65, 期号: 5, 页码: 860-862
Zheng J
;
Tao YL
;
Wang W
;
Zhang LZ
;
Zuo YH
;
Xue CL
;
Cheng BW
;
Wang QM
收藏
  |  
浏览/下载:65/3
  |  
提交时间:2011/07/05
Luminescence
Optical materials and properties
Sputtering
Thin films
PHOTOLUMINESCENCE
ER3+
Efficient 1.53 mu m emission and energy transfer in Si/Er-Si-O multilayer structure
期刊论文
materials research bulletin, 2011, 卷号: 46, 期号: 2, 页码: 262-265
作者:
Xue CL
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  |  
浏览/下载:63/4
  |  
提交时间:2011/07/05
Multilayers
Inorganic compounds
Sputtering
Optical properties
DOPED SI/SIO2 SUPERLATTICES
ERBIUM SILICATE
ER3+
LUMINESCENCE
FILMS
PHOTOLUMINESCENCE
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