CORC

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High-quality homoepitaxial layers grown on4H-SiC at a high growth rate by vertical LPCVD 期刊论文
journal of semiconductors, 2011, 卷号: 32, 期号: 4, 页码: 43005
Wu, Hailei; Sun, Guosheng; Yang, Ting; Yan, Guoguo; Wang, Lei; Zhao, Wanshun; Liu, Xingfang; Zeng, Yiping; Wen, Jialiang
收藏  |  浏览/下载:23/0  |  提交时间:2012/06/14
In-Situ Boron and Aluminum Doping and Their Memory Effects in 4H-SiC Homoepitaxial Layers Grown by Hot-Wall LPCVD 会议论文
international conference on silicon carbide and related materials, otsu, japan, oct 14-19, 2007
Sun, GS; Zhao, YM; Wang, L; Wang, L; Zhao, WS; Liu, XF; Ji, G; Zeng, YP
收藏  |  浏览/下载:40/0  |  提交时间:2010/03/09
Homoepitaxial growth of 4H-SiC multi-epilayers and its application to UV detection 会议论文
6th european conference on silicon carbide and related materials, newcastle upon tyne, england, sep, 2006
Liu, XF (Liu, X. F.); Sun, GS (Sun, G. S.); Zhao, YM (Zhao, Y. M.); Ning, J (Ning, J.); Li, JY (Li, J. Y.); Wang, L (Wang, L.); Zhao, WS (Zhao, W. S.); Luo, MC (Luo, M. C.); Li, JM (Li, J. M.)
收藏  |  浏览/下载:103/26  |  提交时间:2010/03/29
水平冷壁CVD生长4H-SiC同质外延膜 期刊论文
半导体学报/Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 2005, 卷号: 26, 期号: 5, 页码: 935-940
作者:  高欣;  孙国胜;  李晋闽;  赵万顺;  王雷
收藏  |  浏览/下载:3/0  |  提交时间:2015/04/27
Homoepitaxial growth and MOS structures of 4H-SiC on off oriented n-type (0001)Si-faces 会议论文
7th international conference on solid-state and integrated circuits technology, beijing, peoples r china, oct 18-21, 2004
Sun, GS; Ning, J; Zhang, YX; Gao, X; Wang, L; Zhao, WS; Zeng, YP; Li, JM
收藏  |  浏览/下载:206/60  |  提交时间:2010/03/29
Homoepitaxial growth and device characteristics of SiC on Si-face (0001) 6H-SiC 会议论文
11th international conference on molecular beam epitaxy (mbe-xi), beijing, peoples r china, sep 11-15, 2000
Li JM; Sun GS; Zhu SR; Wang L; Luo MC; Zhang FF; Lin LY
收藏  |  浏览/下载:10/0  |  提交时间:2010/11/15
Homoepitaxial growth and device characteristics of SiC on Si-face (0001) 6H-SiC 期刊论文
journal of crystal growth, 2001, 卷号: 227, 期号: 0, 页码: 816-819
Li JM; Sun GS; Zhu SR; Wang L; Luo MC; Zhang FF; Lin LY
收藏  |  浏览/下载:79/6  |  提交时间:2010/08/12


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