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CORC

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Design of a Graphene Capacitive Pressure Sensor for Ultra-low Pressure Detection 其他
2016-01-01
Zhang, Yangxi; Gui, Yiming; Meng, Fanrui; Gao, Chengchen; Hao, Yilong
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03
Silicon Carbide Capacitive Pressure Sensors with arrayed sensing membranes 其他
2013-01-01
Meng, Bo; Tang, Wei; Peng, Xuhua; Zhang, Haixia
收藏  |  浏览/下载：1/0  |  提交时间：2015/11/13
Monolithic Integration of a Micromachined Flow Sensor Based on Post-CMOS 其他
2012-01-01
Li, Dan; Yang, Fang; Zhao, Danqi; Li, Ting; Zhang, Dacheng
收藏  |  浏览/下载：6/0  |  提交时间：2015/11/10
Study of Polyimide as Sacrificial Layer with O(2) Plasma Releasing for Its Application in MEMS Capacitive FPA Fabrication 其他
2009-01-01
Ma, Shenglin; Li, Ying; Sun, Xin; Yu, Xiaomei; Jin, Yufeng
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/16
FABRICATION OF SiC MEMS PRESSURE SENSOR BY ANODIC BONDING 其他
2008-01-01
Tang, Wei; Chen, Zhe; Tian, Dayu; Zhang, Haixia
收藏  |  浏览/下载：7/0  |  提交时间：2015/11/13
Research on a novel integrated pressure sensor for high temperature 其他
2002-01-01
Zhang, W; Jia, JB; Liu, B
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
Wafer level packaging for gyroscope by Au/Si eutectic bonding 其他
2002-01-01
Ruan, Y; Zhang, DC; Yang, ZC; Wang, M; Yu, XM
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/13

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