QQ客服 官方微博 反馈留言

	Monolithic Integration of a Micromachined Flow Sensor Based on Post-CMOS
	Li, Dan ; Yang, Fang ; Zhao, Danqi ; Li, Ting ; Zhang, Dacheng
	2012
关键词	MEMS flow sensor Post-CMOS Inter-CMOS PRESSURE SENSOR
英文摘要	This paper investigates design, fabrication and testing of a monolithic piezoresistive flow sensor with on-chip signal conditioning circuit. Post-CMOS Processing of this flow sensor will be the focus of this paper, starting from theoretical analysis and numerical simulation, and moving to experimental verification. The flow sensor presented here is comprised of four symmetrically arranged silicon diaphragms with piezoresistors on them used to sense the drag force induced by the input gas flow. Piezoresistor fabrication has been merged into a conventional CMOS process and releasing of sensing part is conducted after CMOS processing. An integrated flow sensor with on-chip CMOS circuitry fabricated using this novel post-CMOS process was fabricated and tested. The integration method shows good compatibility of MEMS process with the state of art CMOS process. A quadratic relation between output voltage and flow rate was obtained within flow rate of 0-5L/min and the testing result was then compared with an Inter-CMOS based flow sensor. (C) 2012 Elsevier Ltd....Selection and/or peer-review under responsibility of the Symposium Cracoviense Sp. z.o.o.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000312953300249&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Instruments & Instrumentation; Physics, Applied; CPCI-S(ISTP); 1
语种	英语
DOI标识	10.1016/j.proeng.2012.09.318
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/153238]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Li, Dan,Yang, Fang,Zhao, Danqi,et al. Monolithic Integration of a Micromachined Flow Sensor Based on Post-CMOS. 2012-01-01.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。