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CORC

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Fine-pitch through-silicon via integration with self-aligned back-side benzocyclobutene passivation layer 期刊论文
MICRO & NANO LETTERS, 2016
Guan, Yong; Ma, Shenglin; Zeng, Qinghua; Chen, Jing; Jin, Yufeng
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Fabrication of laterally driven bulk titanium devices on titanium-on-glass wafers 期刊论文
journal of micromechanics and microengineering, 2013
Zhang, Yiming; Li, Nannan; Yan, Bo; Feng, Xiaoyang; Hu, Jia; He, Shuwei; Hao, Yilong; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/10
Chemical-Mechanical Polishing of Bulk Tungsten Substrate 其他
2013-01-01
Luo, Jin; Zhang, Yiming; Song, Lu; Chen, Shuhui; Bian, Yuan; Li, Tianyu; Hao, Yilong; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/16
Design and Process Development of a Stacked SRAM Memory Chip Module with TSV Interconnection 其他
2012-01-01
Ma, Shenglin; Sun, Xin; Zhu, Yunhui; Zhu, Zhiyuan; Cui, Qinghu; Chen, Meng; Xiao, Yongqiang; Chen, Jing; Miao, Min; Lu, Wengao; Jin, Yufeng
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/16
Design and process development of a stacked SRAM memory chip module with TSV interconnection 其他
2012-01-01
Ma, Shenglin; Sun, Xin; Zhu, Yunhui; Zhu, Zhiyuan; Cui, Qinghu; Chen, Meng; Xiao, Yongqiang; Chen, Jing; Miao, Min; Lu, Wengao; Jin, Yufeng
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/17
Current sustainability and electromigration of Pd, Sc and Y thin-films as potential interconnects 期刊论文
nano micro letters, 2010
Yang, Yong; Xu, Shengyong; Xie, Sishen; Peng, Lian-Mao
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/12
FAILURE INVESTIGATION AND ANALYSIS OF ABNORMAL CAPACITANCE OF ACCELEROMETER AFTER ICP RELEASE 其他
2008-01-01
An, Ping; He, Yandong; Wang, Shitao; Bai, Yanping; Hao, Yilong
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/13
Universal fixture for assembling and testing of a silicon-based micro combustor 其他
2005-01-01
Jin, YF; Shan, XC; Wang, Z; Zhang, H; Wong, CK
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13

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