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浏览/检索结果: 共3条，第1-3条 帮助 限定条件 专题：西安交通大学    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择发表日期升序发表日期降序提交时间升序提交时间降序题名升序题名降序作者升序作者降序 Wafer-level fabrication of low power consumption integrated alcohol microsensor 期刊论文 MICRO & NANO LETTERS, 2019, 卷号: 14, 页码: 11-16 作者:  Wang, Hairong;  Wang, Mengya;  Lei, Weitao;  Chen, Xiaowei;  Huang, Hao 收藏  |  浏览/下载：27/0  |  提交时间：2019/11/19 nanocomposites  electrodes  membranes  alcohol detection  sputter deposition  organic compounds  suspensions  gas sensors  temperature sensors  power 39  microsensors  microelectromechanical systems micromachining technology  wafer-level sensor chips  electrochemical electrodes  micromachining  TiO2-SnO2  magnetron sputtering  temperature measurement  power consumption  suspended membrane  power measurement  0 mW  nanosensors  titanium compounds  low power consumption integrated alcohol microgas sensor  microheater  wafer-level fabrication  tin compounds   Modelling and characterisation of a micromachined resonant pressure sensor with piezoelectric excitation and sensing 期刊论文 MICRO & NANO LETTERS, 2016, 卷号: 11, 期号: [db:dc_citation_issue], 页码: 326-331 作者:  Cheng, Rongjun;  Zhao, Yulong;  Li, Cun;  Li, Bo;  Zhang, Qi 收藏  |  浏览/下载：4/0  |  提交时间：2019/12/02 micromachined resonant pressure sensor  quartz resonator  micropressure measurement  piezoelectric excitation  electronics packaging  double enhancement beam  micromachining  quality factor  micromachined diaphragm  microsensors  crystal resonators  piezoelectric transducers  finite element method  finite element analysis  piezoelectric sensor  temperature 293 K to 298 K  diaphragms  Q-factor measurement  pressure sensors  pressure-10 kPa to 10 kPa  self-excitation circuit design   Optical micro-electro-mechanical-system pressure sensor based on light intensity modulation 期刊论文 Micro & Nano Letters, 2015, 卷号: 10, 期号: [db:dc_citation_issue], 页码: 491-495 作者:  Zhao, Yulong;  Li, Cun;  Hao, Mengmeng;  Cheng, Rongjun;  Fan, Xiaole 收藏  |  浏览/下载：4/0  |  提交时间：2019/12/02 thin film  finite element method  flammable areas  fibre conducts  light intensity modulation  silicon compounds  microsensors  bulk micromachining technology  optical microelectromechanical-system pressure sensor  combustible areas  optical cables  intensity modulation  pressure sensors  silicon diaphragm deformation  micromachining  pressure measurement  finite element analysis  optical cable  reflected light intensity shift  pressure 0 MPa to 20 MPa  signal transmission  photoelectric detection circuit  micro-optomechanical devices  elemental semiconductors  optical modulation  thin films  source light  silicon  fibre optic sensors