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	Wafer-level fabrication of low power consumption integrated alcohol microsensor
	Wang, Hairong; Wang, Mengya; Lei, Weitao; Chen, Xiaowei; Huang, Hao; Wang, Jiuhong
刊名	MICRO & NANO LETTERS
	2019
卷号	14页码:11-16
关键词	nanocomposites electrodes membranes alcohol detection sputter deposition organic compounds suspensions gas sensors temperature sensors power 39 microsensors microelectromechanical systems micromachining technology wafer-level sensor chips electrochemical electrodes micromachining TiO2-SnO2 magnetron sputtering temperature measurement power consumption suspended membrane power measurement 0 mW nanosensors titanium compounds low power consumption integrated alcohol microgas sensor microheater wafer-level fabrication tin compounds
ISSN号	1750-0443
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2826765
专题	西安交通大学
推荐引用方式 GB/T 7714	Wang, Hairong,Wang, Mengya,Lei, Weitao,et al. Wafer-level fabrication of low power consumption integrated alcohol microsensor[J]. MICRO & NANO LETTERS,2019,14:11-16.
APA	Wang, Hairong,Wang, Mengya,Lei, Weitao,Chen, Xiaowei,Huang, Hao,&Wang, Jiuhong.(2019).Wafer-level fabrication of low power consumption integrated alcohol microsensor.MICRO & NANO LETTERS,14,11-16.
MLA	Wang, Hairong,et al."Wafer-level fabrication of low power consumption integrated alcohol microsensor".MICRO & NANO LETTERS 14(2019):11-16.

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