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浏览/检索结果: 共2条，第1-2条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择发表日期升序发表日期降序提交时间升序提交时间降序题名升序题名降序作者升序作者降序 Wafer-level fabrication of low power consumption integrated alcohol microsensor 期刊论文 MICRO & NANO LETTERS, 2019, 卷号: 14, 页码: 11-16 作者:  Wang, Hairong;  Wang, Mengya;  Lei, Weitao;  Chen, Xiaowei;  Huang, Hao 收藏  |  浏览/下载：27/0  |  提交时间：2019/11/19 nanocomposites  electrodes  membranes  alcohol detection  sputter deposition  organic compounds  suspensions  gas sensors  temperature sensors  power 39  microsensors  microelectromechanical systems micromachining technology  wafer-level sensor chips  electrochemical electrodes  micromachining  TiO2-SnO2  magnetron sputtering  temperature measurement  power consumption  suspended membrane  power measurement  0 mW  nanosensors  titanium compounds  low power consumption integrated alcohol microgas sensor  microheater  wafer-level fabrication  tin compounds   Length-extensional resonating gas sensors with ic-foundry compatible low-cost fabrication in non-soi single-wafer 期刊论文 Microelectronic engineering, 2015, 卷号: 136, 页码: 1-7 作者:  Yu, Feng;  Xu, Pengcheng;  Wang, Jiachou;  Li, Xinxin 收藏  |  浏览/下载：70/0  |  提交时间：2019/05/10 Resonant gas sensor  Extensional bulk resonance mode  Non-soi wafer  Low-cost fabrication  Integrated-circuit foundry  Organo-phosphorous pesticide