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Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding 期刊论文
CHINESE OPTICS LETTERS, 2019, 卷号: 17, 期号: 10, 页码: 5
作者:  Zhang, Lu;  Zhang, Wendong;  Zhang, Shougang;  Yan, Shubin
收藏  |  浏览/下载：33/0  |  提交时间：2021/11/29
Catalyst-free growth of a Zn2GeO4 nanowire network for high-performance transfer-free solar-blind deep UV detection 期刊论文
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2019, 卷号: 107, 页码: 1-4
作者:  Zhao, Yiming;  Feng, Shuanglong;  Jiang, Haitao;  Ma, Sai;  Tao, Zhiyong
收藏  |  浏览/下载：55/0  |  提交时间：2019/02/19
microfabricationandhermeticitymeasurementofalkaliatomvaporcellsbasedonanodicbonding 期刊论文
chineseopticsletters, 2019, 卷号: 17, 期号: 10
作者:  Zhang Lu;  Zhang Wendong;  Zhang Shougang;  Yan Shubin
收藏  |  浏览/下载：3/0  |  提交时间：2020/09/02
CLOCKS  
Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2018, 卷号: 27, 期号: 3, 页码: 538-546
作者:  Zheng, Zhou;  Na, Shuai;  Chen, Albert I. -Hsiang;  Li, Zhenhao;  Wong, Lawrence L. P.
收藏  |  浏览/下载：34/0  |  提交时间：2018/07/30
Inclination Effects on Voltage-controlled Tuning of MEMS Disk Resonator Array Composite Fabricated by Deep Reactive-ion Etching 期刊论文
SENSORS AND MATERIALS, 2018, 卷号: 30, 页码: 2747-2760
作者:  Yan, Haixia;  Bao, Jinyan;  Yu, Quan;  Dong, Linxi
收藏  |  浏览/下载：13/0  |  提交时间：2019/11/26
Absorption enhancement in nanostructured silicon fabricated by self-assembled nanosphere lithography 期刊论文
Optical Materials, 2017, 卷号: 70
作者:  Li, Q.;  J. S. Gao;  Z. Z. Li;  H. G. Yang;  H. Liu
收藏  |  浏览/下载：17/0  |  提交时间：2018/06/13
Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi-step deep reactive ion etching process 期刊论文
MICRO & NANO LETTERS, 2017, 卷号: 12, 页码: 482-485
作者:  Wang, Wenqiang;  Li, Chen;  Xu, Wencai;  Zou, Helin
收藏  |  浏览/下载：2/0  |  提交时间：2019/12/02
Effects of deep reactive ion etching parameters on etching rate and surface morphology in extremely deep silicon etch process with high aspect ratio 期刊论文
ADVANCES IN MECHANICAL ENGINEERING, 2017, 卷号: 9
作者:  Xu, Tiantong;  Tao, Zhi;  Li, Hanqing;  Tan, Xiao;  Li, Haiwang
收藏  |  浏览/下载：2/0  |  提交时间：2019/12/30
Self-aligned, gated bulk molybdenum field emitter arrays 其他
2016-01-01
Zhu, Ningli; Xu, Kaisi; Zhai, Yusheng; Tao, Zhi; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
A metal-oxide-semiconductor radiation dosimeter with a thick and defect-rich oxide layer 期刊论文
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016
Liu, Hongrui; Yang, Yuhao; Zhang, Jinwen
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03

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