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科研机构
半导体研究所 [3]
西安交通大学 [1]
重庆大学 [1]
西安理工大学 [1]
内容类型
期刊论文 [6]
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2014 [2]
2013 [1]
2009 [1]
2007 [2]
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半导体材料 [1]
微电子学 [1]
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Fabrication of template with dual-scale structures based on glass wet etching and its application in hydrophobic surface preparation
期刊论文
MICRO & NANO LETTERS, 2014, 卷号: 9, 期号: [db:dc_citation_issue], 页码: 340-344
作者:
Wang, Quandai
;
Song, Yixiong
;
Wang, Li
;
Xiao, Jiming
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/03
dual-scale hierarchical structures
nanolithography
surface roughness
template fabrication method
cast moulding
buffered hydrofluoric solution
hydrophobicity
contact angle
nanofabrication
etching
contact angles
uniform microstructures
master template
Optical photos
photoresist
etched
template-based methods
hierarchical structures
SiO2
water
nanostructured materials
etching mask
optical photos
atomic force microscopy
surface etched
imprint lithography
glass wet etching
photoresists
pattern transferring
wettability
H2O
fused silica glass substrate
crystal microstructure
superhydrophobic surface preparation
AFM scans
Fabrication of template with dual-scale structures based on glass wet etching and its application in hydrophobic surface preparation
期刊论文
2014, 卷号: 9, 页码: 340-344
作者:
Wang, Quandai
;
Song, Yixiong
;
Wang, Li
;
Xiao, Jiming
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2019/12/20
etching
hydrophobicity
photoresists
atomic force microscopy
crystal microstructure
nanostructured materials
nanofabrication
nanolithography
contact angle
water
glass wet etching
template-based methods
superhydrophobic surface preparation
dual-scale hierarchical structures
template fabrication method
etching mask
photoresist
fused silica glass substrate
etched
buffered hydrofluoric solution
Optical photos
AFM scans
uniform microstructures
surface etched
hierarchic
High-quality fiber fabrication in buffered hydrofluoric acid solution with ultrasonic agitation
期刊论文
2013, 卷号: 52, 页码: 1432-1440
作者:
Zhong, Nianbing
;
Liao, Qiang[1]
;
Zhu, Xun
;
Wang, Yongzhong
;
Chen, Rong
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/11/28
Dependence of wet etch rate on deposition, annealing conditions and etchants for PECVD silicon nitride film
期刊论文
半导体学报, 2009, 卷号: 30, 期号: 9, 页码: 151-154
作者:
Li Yan
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2010/11/23
Fabrication of nanoscale metallic air-bridges by introducing a sio2 sacrificial layer
期刊论文
Materials science in semiconductor processing, 2007, 卷号: 10, 期号: 4-5, 页码: 194-199
作者:
Zhang, Yang
;
Liu, Jian
;
Li, Yan
;
Yang, Fuhua
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2019/05/12
Nanoscale metallic air-bridge
Sacrificial layer
Electron-beam lithography
Fabrication of nanoscale metallic air-bridges by introducing a SiO2 sacrificial layer
期刊论文
materials science in semiconductor processing, 2007, 卷号: 10, 期号: 39908, 页码: 194-199
Zhang, Y
;
Liu, J
;
Li, Y
;
Yang, FH
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  |  
浏览/下载:62/2
  |  
提交时间:2010/03/08
nanoscale metallic air-bridge
sacrificial layer
electron-beam lithography
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