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Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy
会议论文
Chengdu, China, June 26, 2018 - June 29, 2018
作者:
Xie, Zhongye
;
Tang, Yan
;
Liu, Xi
;
Yang, Kejun
;
Hu, Song
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2021/05/06
Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy
会议论文
Chengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA, JUN 26-29, 2018JUN 26-29, 2018
作者:
Xie, Zhongye
;
Tang, Yan
;
Liu, Xi
;
Yang, Kejun
;
Hu, Song
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2019/08/23
thin films
Fourier transform
microscopy
surface topography
digital micro-mirror devices
modulation
Optical characterization of LaF3 by variable angle purged UV spectroscopic ellipsometry
会议论文
2012 International Conference on Nanotechnology and Precision Engineering, ICNPE 2012, December 26, 2012 - December 27, 2012, Guilin, China, December 26, 2012 - December 27, 2012
Deng W.
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  |  
浏览/下载:11/0
  |  
提交时间:2014/05/15
Mass transfer and kinetics study on the sulfite forced oxidation with manganese ion catalyst
会议论文
KOREAN JOURNAL OF CHEMICAL ENGINEERING, 6th Korea-China Workshop on Clean Energy Technology, Busan, SOUTH KOREA, Web of Science
Bo, Zhao
;
Yan, Li
;
Zhuo Yuqun
;
Tong Huiting
;
Zhang Xiaowen
;
Chen Changhe
收藏
  |  
浏览/下载:3/0
Potential applications of photothermal interferometric detection technique in the single-layer optical thin film system
会议论文
Proceedings of the SPIE - The International Society for Optical Engineering, 2010
作者:
Honggang Hao
;
Jianwen Fang
;
Xiangming Liu
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2016/11/25
Unique reactivity of confined metal atoms on silicon substrate
会议论文
14th international congress on catalysis, korea, 2008-7-13
姚运喜
;
刘新
;
傅强
;
李微雪
;
谭大力
;
包信和
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2011/07/11
Analysis of micro-indentation problem of a soft film on a hard substrate
会议论文
International Conference on Heterogeneous Material Mechanics (ICHMM), Huangshan, PEOPLES R CHINA, JUN 03-08, 2008
作者:
Yi DK
;
Wang ZQ(王自强)
收藏
  |  
浏览/下载:1138/27
  |  
提交时间:2009/07/23
Strain Gradient Theory
Size Effect
Soft Film
Hard Substrate
Plasticity
Fabrication and electron emission of carbon microtubes (EI CONFERENCE)
会议论文
Technical Digest of the 18th International Vacuum Nanoelectronics Conference, IVNC 2005, July 10, 2005 - July 14, 2005, Oxford, United kingdom
Wang W.
;
Xia Y.
;
Lei D.
;
Chen S.
;
Liu L.
;
Chen M.
;
Liang J.
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  |  
浏览/下载:29/0
  |  
提交时间:2013/03/25
Carbon nanotubes have been attracting attention because of their unique physical properties and their application potential for field emission cathode. Carbon nanotubes possess the following properties favorable for field emission material
such as a high aspect ratio and sharp tip
high chemical stability
high mechanical strength
stable at high temperature. Some research works on carbon nanotubes field emitter and field emission display have been reported. Here
a kind of carbon microtubes and its field emission properties are introduced. They have some different properties with carbon nanotubes
and the density is lower than carbon nanotubes bundles. These carbon microtubes are directly synthesized by liquidoid epitaxy method on silicon substrates at low temperature. The field emission properties of carbon microtubes are reported too. Carbon microtubes film is synthesized in liquid by electrolysis. The graphite plate is as anode
and n-silicon substrate with resistivity of 4-8 cm is as cathode. The electrolysis current is about 5-8mA/cm2
and applied voltage is 800-1500V. Temperatures of the methanol base solution is maintained at 60C in process of deposition of carbon microtubes. Carbon microtubes film is observed by scanning electron microscopy(SEM)
as shown in fig.1(a
b). The wall's thickness of carbon microtube is about 60nm. The diameter of carbon microtube is about 0.8 m. Raman spectrum of carbon microtubes film shows the two peaks at 1342and 1560cm-1. The field emission properties of carbon microtubes are measured in high vacuum chamber(10-5Pa). The emission area of carbon microtubes is 0.5cm 0.5cm. The threshold of field emission of the carbon microtubes film is about 3.6V/ m. Field emission property of carbon microtubes film is shown in fig.2. Another
when the electric field between anode and cathode is 10V/ m
the electric field distribution on single carbon microtube is also given after calculation according to electric field theory. Fig 3 shows that electric field distribution vertical section on the of single carbon microtube top with 2 m of highness. These results may help us to understand field emission properties of carbon microtubes. According to research results
it is found that liquidoid synthesis is simple method to produce carbon microtubes cold cathode material
and the carbon microtubes have better field emission properties. 2005 IEEE.
The effect of transparent film on its surface 3-D mapping by using vertical scanning white light interferometer (EI CONFERENCE)
会议论文
ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China
Wu X.
;
Lei F.
;
Yatagai T.
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2013/03/25
We have investigated the effect of transparent thin film while mapping its surface profile by using vertical scanning white light interferometer. Our theory analysis showed that multiple reflections taking place within the transparent thin film result in an extra phase change. The simulation and experiment results revealed that this extra phase change is also related to the thickness of thin film
the numerical number of microscope interferometer objective and the spectral distribution of light source. As a result of extra phase change
the interferogram has some deviation in its shape or two interference fringes may appears while the thickness of thin film is large.
Preparation and characterization of erbium doped sol-gel silica glasses
会议论文
conference on rare-earth-doped materials and devices iii, san jose, ca, jan 27-28, 1999
Lei HB
;
Yang QQ
;
Ou HY
;
Chen BW
;
Yu JZ
;
Wang QM
;
Xie DT
;
Wu JG
;
Xu DF
;
Xu GX
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2010/10/29
Er-doped silica glass
sol-gel process
photoluminescence
PLANAR WAVE-GUIDES
MOLECULAR-BEAM EPITAXY
CRYSTAL SILICON
IMPLANTED SI
LUMINESCENCE
ELECTROLUMINESCENCE
FABRICATION
IMPURITIES
FILMS
IONS
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