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浏览/检索结果: 共9条，第1-9条 帮助 限定条件 专题：上海光学精密机械研究所    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Aberration measurement based on principal component analysis of aerial images of optimized marks 期刊论文 opt. commun., 2014, 卷号: 329, 页码: 63 作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo 收藏  |  浏览/下载：16/0  |  提交时间：2016/11/28 Aberration measurement  Principal component analysis  Optimized marks  Aerial image   Aberration measurement technique based on an analytical linear model of a through-focus aerial image 期刊论文 opt. express, 2014, 卷号: 22, 期号: 5, 页码: 5623 作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo 收藏  |  浏览/下载：24/0  |  提交时间：2016/11/28 NIJBOER-ZERNIKE APPROACH  POINT-SPREAD FUNCTIONS  PHASE-SHIFTING MASK  LITHOGRAPHIC TOOLS  PROJECTION OPTICS  COMA MEASUREMENT  ILLUMINATION  COMPUTATION   Aberration measurement based on principal component analysis of aerial images of optimized marks 期刊论文 opt. commun., 2014, 卷号: 329, 页码: 63 作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo 收藏  |  浏览/下载：18/0  |  提交时间：2016/11/28 Aberration measurement  Principal component analysis  Optimized marks  Aerial image   Aberration measurement technique based on an analytical linear model of a through-focus aerial image 期刊论文 opt. express, 2014, 卷号: 22, 期号: 5, 页码: 5623 作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo 收藏  |  浏览/下载：14/0  |  提交时间：2016/11/28 NIJBOER-ZERNIKE APPROACH  POINT-SPREAD FUNCTIONS  PHASE-SHIFTING MASK  LITHOGRAPHIC TOOLS  PROJECTION OPTICS  COMA MEASUREMENT  ILLUMINATION  COMPUTATION   Extended AMAI-PCA technique based on multi-level Box-Behnken design 期刊论文 optik, 2013, 卷号: 124, 期号: 22, 页码: 5513 作者:  Duan, Lifeng;  Wang, Xiangzhao;  Xu, Dongbo;  Bourov, Anatoly;  Li, Sikun 收藏  |  浏览/下载：16/0  |  提交时间：2016/11/28 In situ aberration measurement technique based on an aerial image with an optimized source 期刊论文 opt. eng., 2013, 卷号: 52, 期号: 6, 页码: 63602 作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo 收藏  |  浏览/下载：11/0  |  提交时间：2016/11/28 High-order aberration measurement technique based on a quadratic Zernike model with optimized source 期刊论文 opt. eng., 2013, 卷号: 52, 期号: 5, 页码: 53603 作者:  Yang, Jishuo;  Wang, Xiangzhao;  Li, Sikun;  Duan, Lifeng;  Yan, Guanyong 收藏  |  浏览/下载：13/0  |  提交时间：2016/11/28 In situ aberration measurement technique based on multi-illumination settings and principal component analysis of aerial images 期刊论文 chinese optics letters, 2012, 卷号: 110, 期号: 12 Xu Dongbo; Wang Xiangzhao; Bu Yang; Duan Lifeng; Yan Guanyong; Yang Jishuo; Burov Anatoly Y 收藏  |  浏览/下载：10/0  |  提交时间：2013/09/17 In situ aberration measurement technique based on multi-illumination settings and principal component analysis of aerial images 期刊论文 chinese optics letters, 2012, 期号: 12 Xu Dongbo; Wang Xiangzhao; Bu Yang; Duan Lifeng; Yan Guanyong; Yang Jishuo; Burov Anatoly Y 收藏  |  浏览/下载：8/0  |  提交时间：2013/09/17