Extended AMAI-PCA technique based on multi-level Box-Behnken design

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 信息光学与光电技术实验室

	Extended AMAI-PCA technique based on multi-level Box-Behnken design
	Duan, Lifeng ; Wang, Xiangzhao ; Xu, Dongbo ; Bourov, Anatoly ; Li, Sikun
刊名	optik
	2013
卷号	124 期号:22 页码:5513
通讯作者	wang, xz (reprint author), chinese acad sci, shanghai inst opt & fine mech, lab informat opt & optoelect technol, shanghai 201800, peoples r china.
英文摘要	previously, we reported a technique for in situ projection lens aberration measurement based on principal component analysis of aerial images (amai-pca). the sampling approach of this technique has a great impact on the measurement range and accuracy. to meet the requirement of large aberration measurement, a multi-level box-behnken design approach is tested in conjunction with amai-pca to build the aerial image space. compared with regular box-behnken design, the new approach improves the accuracy by 30% when the amplitude of wavefront aberration is larger than 0.1 lambda. (c) 2013 elsevier gmbh. all rights reserved.
收录类别	SCI
语种	英语
内容类型	期刊论文
版本	出版稿
源URL	[http://ir.siom.ac.cn/handle/181231/14804]
专题	上海光学精密机械研究所_信息光学与光电技术实验室
作者单位	1.[Duan, Lifeng 2.Wang, Xiangzhao 3.Xu, Dongbo 4.Li, Sikun] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Lab Informat Opt & Optoelect Technol, Shanghai 201800, Peoples R China 5.[Duan, Lifeng 6.Wang, Xiangzhao 7.Xu, Dongbo] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China 8.[Duan, Lifeng 9.Bourov, Anatoly] Shanghai Micro Elect Equipment Co Ltd, Shanghai 201203, Peoples R China
推荐引用方式 GB/T 7714	Duan, Lifeng,Wang, Xiangzhao,Xu, Dongbo,et al. Extended AMAI-PCA technique based on multi-level Box-Behnken design[J]. optik,2013,124(22):5513.
APA	Duan, Lifeng,Wang, Xiangzhao,Xu, Dongbo,Bourov, Anatoly,&Li, Sikun.(2013).Extended AMAI-PCA technique based on multi-level Box-Behnken design.optik,124(22),5513.
MLA	Duan, Lifeng,et al."Extended AMAI-PCA technique based on multi-level Box-Behnken design".optik 124.22(2013):5513.