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Study on improving the compactness of SiO2 thin film by PECVD 期刊论文
journal of synthetic crystals, 2013, 卷号: 42, 期号: 4, 页码: 577-581
GUO Wen-tao,TAN Man-qing,JIAO Jian,GUO Xiao-feng,SUN Ning-ning
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