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Influence of nitrogen implantation into the buried oxide on the radiation hardness of silicon-on-insulator wafers 期刊论文
Chinese physics b, 2010, 卷号: 19, 期号: 10, 页码: 6
作者:  Tang Hai-Ma;  Zheng Zhong-Shan;  Zhang En-Xia;  Yu Fang;  Li Ning
收藏  |  浏览/下载:104/0  |  提交时间:2019/05/12
Influence of nitrogen implantation into the buried oxide on the radiation hardness of silicon-on-insulator wafers 期刊论文
chinese physics b, 2010, 卷号: 19, 期号: 10, 页码: art. no. 106106
Tang HM (Tang Hai-Ma); Zheng ZS (Zheng Zhong-Shan); Zhang EX (Zhang En-Xia); Yu F (Yu Fang); Li N (Li Ning); Wang NJ (Wang Ning-Juan)
收藏  |  浏览/下载:48/0  |  提交时间:2010/11/02
Effect of growth conditions on the gan thin film by sputtering deposition 期刊论文
Journal of crystal growth, 2007, 卷号: 299, 期号: 2, 页码: 268-271
作者:  Zhang, C. G.;  Bian, L. F.;  Chen, W. D.;  Hsu, C. C.
收藏  |  浏览/下载:14/0  |  提交时间:2019/05/12
Effect of growth conditions on the GaN thin film by sputtering deposition 期刊论文
journal of crystal growth, 2007, 卷号: 299, 期号: 2, 页码: 268-271
Zhang CG; Bian LF; Chen WD; Hsu CC
收藏  |  浏览/下载:61/0  |  提交时间:2010/03/29
Fabrication and properties of sb-doped zno thin films grown by radio frequency (rf) magnetron sputtering 期刊论文
Journal of crystal growth, 2006, 卷号: 290, 期号: 1, 页码: 56-60
作者:  Wang, P;  Chen, NF;  Yin, ZG;  Yang, F;  Peng, CT
收藏  |  浏览/下载:16/0  |  提交时间:2019/05/12
Fabrication and properties of Sb-doped ZnO thin films grown by radio frequency (RF) magnetron sputtering 期刊论文
journal of crystal growth, 2006, 卷号: 290, 期号: 1, 页码: 56-60
作者:  Yin ZG
收藏  |  浏览/下载:54/0  |  提交时间:2010/04/11
Sensitivity of Total-Dose Radiation Hardness of SIMOX Buried Oxides to Doses of Nitrogen Implantation into Buried Oxides 期刊论文
半导体学报, 2005, 卷号: 26, 期号: 5, 页码: 862-866
Zheng Zhongshan; Liu Zhongli; Zhang Guoqiang; Li Ning; Li Guohua; Ma Hongzhi; Zhang Enxia; Zhang Zhengxuan; Wang Xi
收藏  |  浏览/下载:16/0  |  提交时间:2010/11/23
Improvement of the radiation hardness of SIMOX buried layers using nitrogen implantation 期刊论文
semiconductor science and technology, 2005, 卷号: 20, 期号: 6, 页码: 481-484
Zheng ZS; Liu ZL; Zhang GQ; Li N; Li GH; Ma HZ; Zhang EX; Zhang ZX; Wang X
收藏  |  浏览/下载:32/5  |  提交时间:2010/03/17
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