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大连理工大学 [8]
湖南农业大学 [1]
西安理工大学 [1]
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期刊论文 [9]
会议论文 [1]
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2019 [3]
2017 [1]
2016 [1]
2015 [3]
2013 [1]
2011 [1]
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Scratch behavior and FEM modelling of Cu/Si(100) thin films deposited by modulated pulsed power magnetron sputtering
会议论文
Surface and Coatings Technology
作者:
Meng D(孟笛)
;
Li YG(李玉阁)
;
Jiang ZT(蒋智韬)
;
Lei MK(雷明凯)
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2019/12/02
Flexible hard TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering with controllable peak power
期刊论文
THIN SOLID FILMS, 2019, 卷号: 669, 页码: 377-386
作者:
Chen, H.
;
Zheng, B. C.
;
Li, Y. G.
;
Wu, Z. L.
;
Lei, M. K.
收藏
  |  
浏览/下载:117/0
  |  
提交时间:2019/12/02
Titanium aluminum silicon nitride
Coating
Modulated pulsed power magnetron sputtering
Nanocomposite
Fracture toughness
Flexibility
Hardness
Scratch behavior and FEM modelling of Cu/Si(100) thin films deposited by modulated pulsed power magnetron sputtering
期刊论文
SURFACE & COATINGS TECHNOLOGY, 2019, 卷号: 363, 页码: 25-33
作者:
Meng, D.
;
Li, Y. G.
;
Jiang, Z. T.
;
Lei, M. K.
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2019/12/02
Cu thin films
Scratch behavior
Scratch modelling
Modulated pulsed power magnetron sputtering
Critical loads
Pinite element method
A global plasma model for reactive deposition of compound films by modulated pulsed power magnetron sputtering discharges
期刊论文
JOURNAL OF APPLIED PHYSICS, 2017, 卷号: 121
作者:
Zheng, B.C.
;
Wu, Z.L.
;
Wu, B.
;
Li, Y.G.
;
Lei, M.K.
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/12/02
The structure and toughness of TiN coatings prepared by modulated pulsed power magnetron sputtering
期刊论文
2016, 卷号: 125, 页码: 165-169
作者:
Li, Hongtao
;
Liu, Yanjie
;
Jiang, Bailing
;
Kan, Jinfeng
;
Liu, Zheng
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  |  
浏览/下载:2/0
  |  
提交时间:2019/12/20
TiN coatings
MPP sputtering
Toughness
On the pressure effect in energetic deposition of Cu thin films by modulated pulsed power magnetron sputtering: A global plasma model and experiments
期刊论文
JOURNAL OF APPLIED PHYSICS, 2015, 卷号: 117, 页码: -
作者:
Zheng, B. C.
;
Meng, D.
;
Che, H. L.
;
Lei, M. K.
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/09
Effect of microstructure on mechanical and tribological properties of TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering
期刊论文
THIN SOLID FILMS, 2015, 卷号: 597, 页码: 197-205
作者:
Wu, Z. L.
;
Li, Y. G.
;
Wu, B.
;
Lei, M. K.
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/09
Modulated pulsed power magnetron sputtering
Titanium aluminum silicon nitride
Nanocomposite
Hardness
Wear
Effect of microstructure on mechanical and tribological properties of TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering
期刊论文
Thin Solid Films, 2015, 卷号: 597, 页码: 197-205
作者:
Wu, Z.L.
;
Li, Y.G.
;
Wu, B.
;
Lei, M.K.
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/23
Modulated pulsed power magnetron sputtering
Titanium aluminum silicon nitride
Nanocomposite
Hardness
Wear
Thick CrN/AlN superlattice coatings deposited by the hybrid modulated pulsed power and pulsed dc magnetron sputtering
期刊论文
8th Asian-European International Conference on Plasma Surface Engineering (AEPSE), 2013, 卷号: 228, 页码: S601-S606
作者:
Lin, Jianliang
;
Zhang, Niingyi
;
Wu, Zhili
;
Sproul, William D.
;
Kaufman, Michael
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/12/11
Modulated pulsed power (MPP) magnetron sputtering
High power pulsed magnetron sputtering (HPPMS)
Multilayer coating
CrN/AlN coating
Superlattice
CrAlN
Recent advances in modulated pulsed power magnetron sputtering for surface engineering
期刊论文
JOM, 2011, 卷号: 63, 页码: 48-58
作者:
Lin, Jianliang
;
Sproul, William D.
;
Moore, John J.
;
Wu, Zhili
;
Lee, Sabrina
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/18
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