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	Fabrication of PMMA hard X-ray compound Kinoform lenses 期刊论文 Optics and Precision Engineering光学精密工程, 2017, 卷号: 25, 期号: 11, 页码: 2817-2822 作者: Sheng WF(盛伟繁); Zhang, Wei-Wei; Chang, Guang-Cai; Sheng, Wei-Fan; Yi, Fu-Ting 收藏 \| 浏览/下载：16/0 \| 提交时间：2019/08/27
	Fabrication of PMMA hard X-ray compound Kinoform lenses 期刊论文 Optics and Precision Engineering光学精密工程, 2017, 卷号: 25, 期号: 11, 页码: 2817-2822 作者: Yi, Fu-Ting; Sheng, Wei-Fan; Chang, Guang-Cai; Liu J(刘静); Yi FT(伊福廷) 收藏 \| 浏览/下载：15/0 \| 提交时间：2019/08/29
	Design and fabrication of cascaded X-ray planar parabolic compound refractive lens 期刊论文 ACTA PHYSICA SINICA, 2014, 卷号: 63, 期号: 19 Fu, ML; Le, ZC; Zhou, HQ; Zhang, M; Quan, BS; Wang, H; Mao, CW; Wang, CH; Shen, XY 收藏 \| 浏览/下载：38/0 \| 提交时间：2015/03/13 SYNCHROTRON-RADIATION FOCUSING PERFORMANCE
	Theoretical and experimental results of focusing performance for the parabolic compound X-ray refractive lenses 期刊论文 ACTA PHYSICA SINICA, 2010, 卷号: 59, 期号: 3, 页码: 1977-1984 作者: Le, ZC; Dong, W; Liu, W; Zhang, M; Liang, JQ 收藏 \| 浏览/下载：22/0 \| 提交时间：2016/06/29 X-ray optics compound X-ray refractive lens X-ray focusing synchrontron radiation
	Focusing high-energy x-rays by a PMMA compound x-ray lens on Beijing synchrotron radiation facility 期刊论文 Chinese Physics, 2007, 卷号: 16, 期号: 4, 页码: 984-988 Le Z. C.; Liang J. Q.; Dong W.; Zhu P. P.; Peng L. Q.; Wang W. B.; Huang W. X.; Yuan Q. X.; Wang J. Y. 收藏 \| 浏览/下载：12/0 \| 提交时间：2012/10/21
	Focusing high-energy x-rays by a PMMA compound x-ray lens on Beijing synchrotron radiation facility 期刊论文 CHINESE PHYSICS, 2007, 卷号: 16, 期号: 4, 页码: 984-988 作者: Le, ZC; Liang, JQ; Dong, W; Zhu, PP; Peng, LQ 收藏 \| 浏览/下载：22/0 \| 提交时间：2016/06/29 PMMA compound x-ray lens focusing performance Beijing synchrotron radiation facility (BSRF)
	The study on the epoxy resin compound X-ray refractive lens (EI CONFERENCE) 会议论文 ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China Liang J.; Le Z.; Peng L.; Wang W.; Yi F.; Quan B.; Yao J.; Zhang J.; Dong W.; Xuan M. 收藏 \| 浏览/下载：18/0 \| 提交时间：2013/03/25 In this paper the authors report their resent results of the study on the epoxy resin compound X-ray refractive lens. At the first the theoretical results of the structure parameters for such a device are given. Then the fabrication technologies are presented. They are deep soft X-ray lithography mold-manufacturing and molding. The material of X-ray photoresist is PMMA the mold is made of silicone rubber and the material of the lens is epoxy resin. Some measured results by means of optical microscope and SEM are also shown. The structure height of the epoxy resin compound lens is measured to be 500 micrometers.
	The study on the compound X-ray refractive lens using LIGA technique (EI CONFERENCE) 会议论文 MEMS/MOEMS Technologies and Applications II, November 10, 2004 - November 12, 2004, Beijing, China Liang J.; Le Z.; Peng L.; Wang W.; Lan W.; Ming A.; Yi F.; Ye J.; Quan B.; Yao J.; Xuan M.; Wang L. 收藏 \| 浏览/下载：14/0 \| 提交时间：2013/03/25 A theoretical method of focusing X-rays by the compound X-ray refractive lens is presented in this paper. The authors report their resent theoretical results including the material selection and structure parameters for such a device. As an example a compound X-ray refractive lens with PMMA material is designed. The detailed fabrication process of the PMMA compound lens by LIGA technology is described. Moreover some measured results by means of SEM are also shown. The structure height of one of the PMMA compound lens is measured to be 500m.

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