Fabrication of PMMA hard X-ray compound Kinoform lenses

doi:10.3788/OPE.20172511.2817

	Fabrication of PMMA hard X-ray compound Kinoform lenses
	Sheng WF(盛伟繁); Zhang, Wei-Wei; Chang, Guang-Cai; Sheng, Wei-Fan; Yi, Fu-Ting; Liu, Jing; Zhang WW(张伟伟); Chang GC(常广才); Liu J(刘静); Yi FT(伊福廷)
刊名	Optics and Precision Engineering光学精密工程
	2017
卷号	25 期号:11 页码:2817-2822
ISSN号	1004924X
DOI	10.3788/OPE.20172511.2817
其他题名	聚甲基丙烯酸甲酯材质硬X射线组合Kinoform透镜的制作
文献子类	Article
英文摘要	To improve the focusing performance of hard X-ray focusing elements, a hard X-ray Compound Kinoform Lens (CKL) based on Polymethyl methacrylate (PMMA) with a depth of 60 μm is fabricated by LIGA( Lithographie, Galvanoformung, Abformung)technology, and its excellent morphology is obtained. The main structure of CKL is a narrow pattern with a few micron widths, including the curve and the rectangular surfaces, and the width of the narrowest pattern is only 2 μm. The fabrication of the CKL is divided into three parts to ensure its excellent morphology: the transitional mask preparation, LIGA mask preparation, and hard X-ray exposure to get the finial samples. The nanopillar arrays on silicon substrate are used to solve the falling-off problem of the photoresist during the LIGA mask preparation. Then the PMMA sample with a high molecular weight is selected as the substrate to improve the rigidity of the PMMA and to relieve the adhesion and collapse of the narrow pattern in the final sample preparation. The focusing performance of CKL is tested at X-ray microscope beam-line of Beijing Synchrotron Radiation Facility (BSRF). The experiment result for an 8 keV X-ray at transmission shows its full-width-at-half-maximum (FWHM) peak size for focusing spot is 440 nm. © 2017, Science Press. All right reserved.
语种	中文
CSCD记录号	CSCD:6122332
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/284252]
专题	高能物理研究所_多学科研究中心
作者单位	Institute of High Energy Physics, Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式 GB/T 7714	Sheng WF,Zhang, Wei-Wei,Chang, Guang-Cai,et al. Fabrication of PMMA hard X-ray compound Kinoform lenses[J]. Optics and Precision Engineering光学精密工程,2017,25(11):2817-2822.
APA	盛伟繁.,Zhang, Wei-Wei.,Chang, Guang-Cai.,Sheng, Wei-Fan.,Yi, Fu-Ting.,...&伊福廷.(2017).Fabrication of PMMA hard X-ray compound Kinoform lenses.Optics and Precision Engineering光学精密工程,25(11),2817-2822.
MLA	盛伟繁,et al."Fabrication of PMMA hard X-ray compound Kinoform lenses".Optics and Precision Engineering光学精密工程 25.11(2017):2817-2822.