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Active roles of helium in the growth of hydrogenated microcrystalline silicon germanium thin films 期刊论文
THIN SOLID FILMS, 2012, 卷号: 520, 期号: 18, 页码: 5940-5945
Zhang, LP; Zhang, JJ; Zhang, X; Cao, Y; Zhao, Y
收藏  |  浏览/下载:24/0  |  提交时间:2013/04/24
The influence of H-2/Ar ratio on Ge content of the mu c-SiGe:H films deposited by PECVD 期刊论文
JOURNAL OF ALLOYS AND COMPOUNDS, 2010, 卷号: 504, 期号: 2, 页码: 403-406
作者:  Tang, ZG;  Wang, WB;  Wang, DS;  Liu, DQ;  Liu, QM
收藏  |  浏览/下载:3/0  |  提交时间:2015/05/25


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