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CORC

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Investigation of current collapse mechanism of LPCVD Si3N4 passivated AlGaN/GaN HEMTs by fast soft-switched current-DLTS and CC-DLTFS 会议论文
作者:  Kang XW(康玄武);  Huang S(黄森);  Wei K(魏珂);  Wang XH(王鑫华);  Zhang JH(章晋汉)
收藏  |  浏览/下载：12/0  |  提交时间：2018/07/20
Fabrication of normally-off AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistors by photo-electrochemical gate recess etching in ionic liquid 期刊论文
APPLIED PHYSICS EXPRESS, 2016, 卷号: 9, 期号: 8
作者:  Zhang, ZL(张志利);  Qin, SJ(秦双娇);  Fu, K(付凯);  Yu, GH(于国浩);  Li, WY
收藏  |  浏览/下载：75/0  |  提交时间：2017/03/11
Studies on High-Voltage GaN-on-Si MIS-HEMTs Using LPCVD Si3N4 as Gate Dielectric and Passivation Layer 期刊论文
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2016, 卷号: 63, 期号: 2
作者:  Zhang, ZL(张志利);  Yu, GH(于国浩);  Zhang, XD(张晓东);  Deng, XG(邓旭光);  Li, SM(李水明)
收藏  |  浏览/下载：36/0  |  提交时间：2017/03/11
16.8 A/600 V AlGaN/GaN MIS-HEMTs employing LPCVD-Si3N4 as gate insulator 期刊论文
ELECTRONICS LETTERS, 2015, 卷号: 51, 期号: 15, 页码: 2
作者:  Zhang, ZL(张志利);  Yu, GH(于国浩);  Zhang, XD(于国浩);  Tan, SX;  Wu, DD(吴冬东)
收藏  |  浏览/下载：43/0  |  提交时间：2015/12/31
Study on PECVD SiO2/Si3N4 double-layer electrets with different thicknesses 期刊论文
science china technological sciences, 2011
Zou XuDong; Zhang JinWen
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/10
用于数字微流体器件的介质上电润湿(EWOD)液滴产生器 期刊论文
2010, 2010
曾雪锋; 岳瑞峰; 吴建刚; 胡欢; 董良; 王喆垚; 何枫; 刘理天
收藏  |  浏览/下载：1/0
Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films From the Load-Deflection of Long Si3N4 and SiO2/Si3N4 Diaphragms 期刊论文
journal of microelectromechanical systems, 2008, 卷号: 17, 期号: 5, 页码: 1120-1134
Yang, JL; Gaspar, J; Paul, O
收藏  |  浏览/下载：24/0  |  提交时间：2010/03/08
Ultra-sensitive, highly reproducible film stress characterization using flexible suspended thin silicon plates and local curvature measurements 期刊论文
journal of micromechanics and microengineering, 2007
Tang, Yu Jie; Chen, Jing; Huang, Yu Bo; Li, Da Chao; Wang, Sha Sha; Li, Zhi Hong; Zhang, Wen Dong
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
Modifying residual stress and stress gradient in LPCVD Si3N4 film with ion implantation 其他
2006-01-01
Shi, Wendian; Zhang, Haixia; Zhang, Guobing; Li, Zhihong
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/12
Evaluating interface effect on stresses in thin films by a local curvature metrology with high accuracy and resolution 其他
2006-01-01
Wang, Shasha; Chen, Jing; Li, Dachao; Huang, Yubo; Li, Zhihong; Zhang, Wendong
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/16

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