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The effect of applied negative bias voltage on the structure of ti-doped a-c : h films deposited by fcva 期刊论文
Applied surface science, 2007, 卷号: 253, 期号: 7, 页码: 3722-3726
作者:  Wang, Peng;  Wang, Xia;  Chen, Youming;  Zhang, Guangan;  Liu, Weimin
收藏  |  浏览/下载：19/0  |  提交时间：2019/05/10
Preparation and characterization of high-quality TiN films at low temperature by filtered cathode arc plasma 期刊论文
journal of vacuum science & technology a, 2004, 卷号: 22, 期号: 6, 页码: 2419-2423
作者:  Zhang, YJ;  Yan, PX;  Wu, ZG;  Xu, JW;  Zhang, WW
收藏  |  浏览/下载：12/0  |  提交时间：2015/11/10
Effect of O-2 pressure on the preferred orientation of TiO2 films prepared by filtered arc deposition 期刊论文
THIN SOLID FILMS, 1998, 卷号: 326, 期号: 1-2, 页码: 171-174
Zhang, F; Liu, XH
收藏  |  浏览/下载：12/0  |  提交时间：2012/03/25
Effect of film thickness on preferred growth of TiN films during filtered arc deposition 期刊论文
JOURNAL OF MATERIALS SCIENCE LETTERS, 1997, 卷号: 16, 期号: 12, 页码: 974-976
Zhao, JP; Wang, X; Chen, ZY; Yang, SQ; Shi, TS; Liu, X
收藏  |  浏览/下载：8/0  |  提交时间：2012/03/25
Atomic force microscopy study on topography of films produced by ion-based techniques 期刊论文
JOURNAL OF APPLIED PHYSICS, 1996, 卷号: 80, 期号: 5, 页码: 2658-2664
Wang,X; Liu,XH; Zou,SC; Martin,PJ; Bendavid,A
收藏  |  浏览/下载：14/0  |  提交时间：2012/03/25
DEPOSITION AND MODIFICATION OF TITANIUM NITRIDE BY ION-ASSISTED ARE DEPOSITION 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 卷号: 13, 期号: 3, 页码: 1658-1664
BENDAVID, A; MARTIN, PJ; WANG, X; WITTLING, M; KINDER, TJ
收藏  |  浏览/下载：10/0  |  提交时间：2012/03/25

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