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CORC

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Investigation on Material Removal Uniformity in Electrochemical Mechanical Polishing by Polishing Pad with Holes 期刊论文
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2019, 卷号: 8, 页码: P3047-P3052
作者:  Liu, Zuotao;  Jin, Zhuji;  Wu, Di;  Guo, Jiang
收藏  |  浏览/下载：4/0  |  提交时间：2019/12/02
On the reaction mechanism of a hydroxyethylidene diphosphonic acid-based electrolyte for electrochemical mechanical polishing of copper 期刊论文
ELECTROCHEMISTRY COMMUNICATIONS, 2019, 卷号: 103, 页码: 48-54
作者:  Wu, Di;  Kang, Renke;  Guo, Jiang;  Liu, Zuotao;  Wan, Ce
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/02
Two-step electrochemical mechanical polishing of pure copper 期刊论文
ECS Journal of Solid State Science and Technology, 2019, 卷号: 8, 页码: P699-P703
作者:  Wu, Di;  Kang, Renke;  Niu, Lin;  Pan, Bo;  Liu, Zuotao
收藏  |  浏览/下载：14/0  |  提交时间：2019/12/02
Designable ultra-smooth ultra-thin solid-electrolyte interphases of three alkali metal anodes 期刊论文
NATURE COMMUNICATIONS, 2018, 卷号: 9, 页码: -
作者:  Gu, Y;  Wang, WW;  Li, YJ;  Wu, QH;  Tang, S
收藏  |  浏览/下载：54/0  |  提交时间：2018/09/06
A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry 期刊论文
APPLIED SURFACE SCIENCE, 2018, 卷号: 427, 页码: 409-415
作者:  Zhang, Zhenyu;  Shi, Zhifeng;  Du, Yuefeng;  Yu, Zhijian;  Guo, Liangchao
收藏  |  浏览/下载：150/0  |  提交时间：2018/12/04
A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry 期刊论文
APPLIED SURFACE SCIENCE, 2018, 卷号: 427, 页码: 409-415
作者:  Yu, Zhijian;  Guo, Dongming;  Guo, Liangchao;  Du, Yuefeng;  Shi, Zhifeng
收藏  |  浏览/下载：152/0  |  提交时间：2018/12/04
基于导电聚合物和纳米材料的固态离子选择性电极的研究 学位论文
博士, 北京: 中国科学院研究生院, 2015
作者:  尹坦姬
收藏  |  浏览/下载：261/0  |  提交时间：2015/07/30
Effect of mechanical polishing on corrosion behavior of Hastelloy C22 coating prepared by high power diode laser cladding 期刊论文
应用表面科学, 2014
Wang, Qin-Ying; Bai, Shu-Lin; Zhao, Yun-Hong; Liu, Zong-De
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/10
Effects of polishing parameters on the evolution of wafer patterns during Cu CMP 会议论文
作者:  Wu, Lixiao;  Yan, Changfeng
收藏  |  浏览/下载：1/0  |  提交时间：2020/11/15
Electrochemical mechanical micromachining based on confined etchant layer technique 期刊论文
http://dx.doi.org/10.1039/c3fd00008g, 2013
Yuan, Ye; Han, Lianhuan; Zhang, Jie; Jia, Jingchun; Zhao, Xuesen; Cao, Yongzhi; Hu, Zhenjiang; Yan, Yongda; Dong, Shen; Tian, Zhong-Qun; Tian, Zhao-Wu; Zhan, Dongping; 张洁; 田中群; 田昭武; 詹东平
收藏  |  浏览/下载：5/0  |  提交时间：2015/07/22

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