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Large Gradient Micro-Structure Topography Measurement with Multi-Angle Stitching Digital Holographic Microscope 期刊论文
Applied Sciences-Basel, 2020, 卷号: 10, 期号: 3, 页码: 10176110-1-12
作者:  Jin, Chuan;  He, Yu;  Tang, Yan;  Xie, Zhongye;  Zhao, Lixin
收藏  |  浏览/下载：24/0  |  提交时间：2021/05/11
Large range nano alignment for proximity lithography using complex grating 期刊论文
Optics and Laser Technology, 2019, 卷号: 112, 页码: 101-106
作者:  Tang, Yan;  Liu, Junbo;  Yang, Yong;  Hu, Song;  Zhao, Lixin
收藏  |  浏览/下载：7/0  |  提交时间：2021/05/06
白光干涉检测仪垂直扫描系统设计 期刊论文
半导体技术, 2017, 卷号: 42, 期号: 3, 页码: 229-234
作者:  姚靖威;  唐燕;  周毅;  邓茜;  赵立新
收藏  |  浏览/下载：10/0  |  提交时间：2018/12/20
Quadratic grating apodized photon sieves for simultaneous multiplane microscopy 期刊论文
Optics and Lasers in Engineering, 2017, 卷号: 97, 页码: 1339-1351
作者:  Cheng, Yiguang;  Zhu, Jiangping;  He, Yu;  Tang, Yan;  Hu, Song
收藏  |  浏览/下载：16/0  |  提交时间：2018/11/20
Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 8, 页码: 2301-2306
作者:  Zhou, Yi;  Tang, Yan;  Zhu, Jiangping;  Deng, Qinyuan;  Yang, Yong
收藏  |  浏览/下载：45/0  |  提交时间：2018/11/20
Focusing Properties of Single-Focus Photon Sieve 期刊论文
IEEE Photonics Technology Letters, 2017, 卷号: 29, 期号: 3, 页码: 275-278
作者:  Cheng, Yiguang;  Zhu, Jiangping;  Hu, Song;  Zhao, Lixin;  Yan, Wei
收藏  |  浏览/下载：22/0  |  提交时间：2018/11/20
Contrast enhancement of microsphere-assisted super-resolution imaging in dark-field microscopy 期刊论文
APPLIED PHYSICS EXPRESS, 2017, 卷号: 10, 期号: 8
作者:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Zhao, Lixin;  Hu, Song
收藏  |  浏览/下载：22/0  |  提交时间：2018/11/20
Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes 期刊论文
Optics and Laser Technology, 2017, 卷号: 93, 页码: 187-193
作者:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Liu, Junbo;  Wang, Jian
收藏  |  浏览/下载：53/0  |  提交时间：2018/11/20
Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry 会议论文
作者:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Zhao, Lixin;  Hu, Song
收藏  |  浏览/下载：46/0  |  提交时间：2018/12/20
High precision locating control system based on VCM for Talbot lithography 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850L
作者:  Yao, Jingwei;  Zhao, Lixin;  Deng, Qian;  Hu, Song
收藏  |  浏览/下载：34/0  |  提交时间：2018/06/14

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