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Piezoelectric grinding force measuring device for detecting grinding force of silicon piece ultra-precise grinding machine, has trapezoidal sleeves evenly fixed on switching plate by nuts, and studs connecting sleeves with flange disks. 专利
申请日期: 2010-01-01, 公开日期: 2010-06-02
作者:  GUO D KANG R LIU B QIAN M ZHANG J Z
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