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	Piezoelectric grinding force measuring device for detecting grinding force of silicon piece ultra-precise grinding machine, has trapezoidal sleeves evenly fixed on switching plate by nuts, and studs connecting sleeves with flange disks.
	GUO D KANG R LIU B QIAN M ZHANG J Z
	2010
公开日期	2010-06-02
URL标识	查看原文
申请日期	2009-11-18
内容类型	专利
URI标识	http://www.corc.org.cn/handle/1471x/5283300
专题	大连理工大学
作者单位	UNIV DALIAN TECHNOLOGY (UYDA-C
推荐引用方式 GB/T 7714	GUO D KANG R LIU B QIAN M ZHANG J Z. Piezoelectric grinding force measuring device for detecting grinding force of silicon piece ultra-precise grinding machine, has trapezoidal sleeves evenly fixed on switching plate by nuts, and studs connecting sleeves with flange disks.. 2010-01-01.

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