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Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography 期刊论文
Applied Surface Science, 2017, 卷号: 425
作者:  Xue, C. F.;  J. Zhao;  Y. Q. Wu;  H. N. Yu;  S. M. Yang
收藏  |  浏览/下载:25/0  |  提交时间:2018/06/13
Structure Design and Numerical Simulation of a High Performance Slit in Soft X-Ray Interference Lithography Beamline at SSRF 期刊论文
Advances in Mechanical Engineering, 2014, 卷号: 12
Gong X. P.; Lu Q. P.; Peng Z. Q.
收藏  |  浏览/下载:15/0  |  提交时间:2015/04/24


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