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科研机构
大连理工大学 [167]
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期刊论文 [149]
会议论文 [16]
专利 [2]
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2019 [7]
2018 [7]
2017 [5]
2016 [9]
2015 [11]
2014 [2]
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专题:大连理工大学
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Effect of the deposition conditions on the properties of photocatalytic WO3 thin films prepared by mid-frequency magnetron sputtering
期刊论文
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2019, 卷号: 99, 页码: 99-105
作者:
Li, H.
;
Mu, Z. X.
;
Liu, S. G.
;
Zhang, J. L.
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2019/12/02
Tungsten oxide
Magnetron sputtering
Photocatalyst
Oxygen effect
Bias effect
Scratch behavior and FEM modelling of Cu/Si(100) thin films deposited by modulated pulsed power magnetron sputtering
会议论文
Surface and Coatings Technology
作者:
Meng D(孟笛)
;
Li YG(李玉阁)
;
Jiang ZT(蒋智韬)
;
Lei MK(雷明凯)
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2019/12/02
Study of nanostructural bismuth oxide films prepared by radio frequency reactive magnetron sputtering
期刊论文
Applied Surface Science, 2019, 卷号: 472, 页码: 165-171
作者:
Meng, L.
;
Xu, W.
;
Zhang, Q.
;
Yang, T.
;
Shi, S.
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2019/12/02
Amorphous films
Amorphous materials
Bismuth compounds
Energy gap
Ions
Magnetron sputtering
Optical band gaps
Optical properties
Oxide films
Radio waves
Sputtering
Substrates
Thin films, Amorphous structures
Bi2O3
Bismuth oxides
Photocatalytic materials
Polycrystalline structure
Quartz substrate
Radio frequency reactive magnetron sputtering
Substrate temperature, Optical films
Flexible hard TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering with controllable peak power
期刊论文
THIN SOLID FILMS, 2019, 卷号: 669, 页码: 377-386
作者:
Chen, H.
;
Zheng, B. C.
;
Li, Y. G.
;
Wu, Z. L.
;
Lei, M. K.
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  |  
浏览/下载:117/0
  |  
提交时间:2019/12/02
Titanium aluminum silicon nitride
Coating
Modulated pulsed power magnetron sputtering
Nanocomposite
Fracture toughness
Flexibility
Hardness
Defect generation mechanism in magnetron sputtered metal films on PMMA substrates
期刊论文
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2019, 卷号: 30, 页码: 14847-14854
作者:
Liu, Junshan
;
He, Liufeng
;
Xu, Zheng
;
Zhao, Xinyue
;
Zhang, Yue
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2019/12/02
Scratch behavior and FEM modelling of Cu/Si(100) thin films deposited by modulated pulsed power magnetron sputtering
期刊论文
SURFACE & COATINGS TECHNOLOGY, 2019, 卷号: 363, 页码: 25-33
作者:
Meng, D.
;
Li, Y. G.
;
Jiang, Z. T.
;
Lei, M. K.
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2019/12/02
Cu thin films
Scratch behavior
Scratch modelling
Modulated pulsed power magnetron sputtering
Critical loads
Pinite element method
Enhanced dielectric and piezoelectric properties of RF sputtered Pb(Zr-0.60,Ti-0.40)O-3 thin films deposited on sol-gel derived Pb1+x(Zr-0.40,Ti-0.60)O-3 seed layer with various lead contents
期刊论文
JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 卷号: 807
作者:
Wang, Xing
;
Wang, Shangfei
;
Qi, Liping
;
Chen, Da
;
Li, Biao
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2019/12/02
Electrical properties
Lead content
Microstructure
Thin films
RF-magnetron sputtering
Seed layer
Structrual and Electrical Properties of Reactive Magnetron Sputtered Yttrium-doped HfO2 Films
期刊论文
Chinese Physics B, 2018, 卷号: 27, 页码: 481031-481036
作者:
Xu J(徐军)
;
Zhou DY(周大雨)
;
Lu WQ(陆文琪)
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/12/02
Hydrogen evolution enhancement of ultra-low loading, size-selected molybdenum sulfide nanoclusters by sulfur enrichment
期刊论文
APPLIED CATALYSIS B-ENVIRONMENTAL, 2018, 卷号: 235, 页码: 84-91
作者:
Escalera-Lopez, Daniel
;
Niu, Yubiao
;
Park, Sung Jin
;
Isaacs, Mark
;
Wilson, Karen
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2019/12/02
Molybdenum sulfide
Nanoclusters
Sulfur-rich
Hydrogen evolution
Magnetron sputtering deposition
Microstructure and tribological behavior of TiAlSiN coatings deposited by deep oscillation magnetron sputtering
期刊论文
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2018, 卷号: 101, 页码: 5166-5176
作者:
Ou, Y. X.
;
Chen, H.
;
Li, Z. Y.
;
Lin, J.
;
Pan, W.
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
deep oscillation magnetron sputtering
hardness
TiAlSiN nanocomposite coatings
wear resistance
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