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科研机构
西安交通大学 [19]
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期刊论文 [16]
会议论文 [3]
发表日期
2019 [1]
2018 [3]
2017 [1]
2016 [1]
2014 [1]
2013 [3]
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专题:西安交通大学
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A liquid MEMS inclinometer sensor with improved sensitivity
期刊论文
Sensors and Actuators, A: Physical, 2019, 卷号: 285, 页码: 369-377
作者:
Xu, Han-yang
;
Zhao, Yu-long
;
Zhang, Kai
;
Wang, Zi-xi
;
Jiang, Kyle
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2019/11/19
Liquid metal droplets
Liquid sensors
Measuring ranges
MEMS fabrication
MEMS gyroscope
Micro electromechanical system (MEMS)
Sliding angle
Superhydrophobic
Analysis on the Centroid Offset of Coupling Beam in Array-composite Resonator due to Process Variations
期刊论文
SENSORS AND MATERIALS, 2018, 卷号: 30, 页码: 2727-2745
作者:
Yan, Haixia
;
Tao, Jiaping
;
Dong, Linxi
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2019/11/26
micro-electromechanical system (MEMS)
centroid offset
micromechanical disk resonator
PSpice simulation
double-disk coupled resonator
Temperature compensation in fluid density measurement using micro-electromechanical resonant sensor
期刊论文
Review of Scientific Instruments, 2018, 卷号: 89
作者:
Zhao, Libo
;
Huang, Linya
;
Hu, Yingjie
;
Jiang, Weile
;
Lu, Dejiang
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2019/11/26
Different densities
Measuring precision
Micro electromechanical system (MEMS)
Reference densities
Simulation analysis
Temperature coefficient
Temperature compensation
Temperature disturbance
Preparation and characterization of lead zirconate titanate thin films grown by RF magnetron sputtering for pyroelectric infrared detector arrays
期刊论文
Ceramics International, 2018, 卷号: 44, 页码: S7-S10
作者:
Zhao, Huifeng
;
Liu, Xuesen
;
Ren, Wei
;
Zhang, Yijun
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2019/11/26
Lead zirconate titanate thin films
Micro electromechanical system (MEMS)
Pyroelectric coefficients
Pyroelectric infrared detector arrays
Pyroelectric properties
PZT thin film
Remnant polarizations
rf-Magnetron sputtering
Advanced microfabrication techniques for the development of millimeter-wave wafer-level waveguide devices
会议论文
作者:
Jones, Thomas R.
;
Vahabisani, Nahid
;
Ye, Ming
;
Daneshmand, Mojgan
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/11/26
Micro electromechanical system (MEMS)
Micro-fabrication techniques
Millimeter-wave components
Millimeter-wave waveguides
RF front end
Wafer level
Waveguide channels
Waveguide device
Scale effect analysis for the vibro-acoustic performance of a micro-plate
期刊论文
Lixue Xuebao/Chinese Journal of Theoretical and Applied Mechanics, 2016, 卷号: 48, 期号: [db:dc_citation_issue], 页码: 907-916
作者:
Tang, Yufan
;
Ren, Shuwei
;
Xin, Fengxian
;
Lu, Tianjian
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2019/12/02
Characteristic length
Governing equations
Micro electromechanical system (MEMS)
Micro-scale effects
Sound transmission loss
Squeeze films
Vibration amplitude
Vibration frequency
Development of density and viscosity measurement system by microelectromechanical systems sensor
期刊论文
Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University, 2014, 卷号: 48, 期号: [db:dc_citation_issue], 页码: 44-48
作者:
Song, Bo
;
Xu, Longqi
;
Zhang, Guiming
;
Zhao, Libo
;
Wang, Xiaopo
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/02
Experimental system
Mean absolute deviations
Micro electromechanical system (MEMS)
n-Heptanes
Quality factors
Resonance frequencies
Simultaneous measurement
Temperature range
High-performance piezoresistive accelerometer with slotted quad-beam structure
期刊论文
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2013, 卷号: 49, 期号: [db:dc_citation_issue], 页码: 198-204
作者:
Zhao, Yulong
;
Liu, Yan
;
Sun, Lu
;
Jiang, Zhuangde
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/12/10
Intelligent equipment
Micro electromechanical system (MEMS)
Micro electro mechanical system
Micromachining techniques
Numerical calculation
Piezo-resistive
Piezoresistive accelerometers
Quad-beam structures
Multi-flexure piezoresistive accelerometer for vibration detection
期刊论文
Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University, 2013, 卷号: 47, 期号: [db:dc_citation_issue], 页码: 33-37
作者:
Liu, Yan
;
Zhao, Yulong
;
Sun, Lu
;
Zhang, Xuefeng
;
Jiang, Zhuangde
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/10
Analytical optimizations
Comprehensive properties
Intelligent Manufacturing
Micro electromechanical system (MEMS)
Micro electro mechanical system
Piezoresistive accelerometers
Sensitivity
Structural dimensions
Pulse breakdown characteristics of microscale gap in micro-electro-mechanical system
期刊论文
Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams, 2013, 卷号: 25, 期号: [db:dc_citation_issue], 页码: 1867-1872
作者:
You, Xiaoguang
;
Cheng, Yonghong
;
Meng, Guodong
;
Wu, Kai
;
Meng, Yongpeng
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2019/12/10
Breakdown electric field
Electrical breakdown
Manufacturing process
Micro electro mechanical system
Micro electromechanical system (MEMS)
Nanosecond pulse
Scanning Electron Microscope
The scanning electron microscopes (SEM)
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