| Analysis on the Centroid Offset of Coupling Beam in Array-composite Resonator due to Process Variations | |
| Yan, Haixia; Tao, Jiaping; Dong, Linxi | |
| 刊名 | SENSORS AND MATERIALS
 |
| 2018 | |
| 卷号 | 30页码:2727-2745 |
| 关键词 | micro-electromechanical system (MEMS) centroid offset micromechanical disk resonator PSpice simulation double-disk coupled resonator |
| ISSN号 | 0914-4935 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2912774 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Yan, Haixia,Tao, Jiaping,Dong, Linxi. Analysis on the Centroid Offset of Coupling Beam in Array-composite Resonator due to Process Variations[J]. SENSORS AND MATERIALS,2018,30:2727-2745. |
| APA | Yan, Haixia,Tao, Jiaping,&Dong, Linxi.(2018).Analysis on the Centroid Offset of Coupling Beam in Array-composite Resonator due to Process Variations.SENSORS AND MATERIALS,30,2727-2745. |
| MLA | Yan, Haixia,et al."Analysis on the Centroid Offset of Coupling Beam in Array-composite Resonator due to Process Variations".SENSORS AND MATERIALS 30(2018):2727-2745. |
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