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Interferometric detection method for micro-displacement based on integrated diffraction grating 期刊论文
2010, 2010
Wu Kang; Ye Xiong-ying; Liu Li-tao; Chen Feng; Zhou Zhao-ying
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Discussion on the improved diffractive superresolution element of the two-photon microfabrication 会议论文
International Technology and Innovation Conference 2006. ITIC 2006, International Technology and Innovation Conference 2006. ITIC 2006, Hangzhou, China, INSPEC
Wei Peng; Zhu Yu; Tan QiaoFeng; Duan GuangHong
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Modeling and simulation of two-dimensional MOEMS scanning mirror 期刊论文
2010, 2010
Zhang Chi; Zhang Gao-fei; You Zheng
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