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	Modeling and simulation of two-dimensional MOEMS scanning mirror
	Zhang Chi ; Zhang Gao-fei ; You Zheng
	2010-05-10 ; 2010-05-10
关键词	Practical Theoretical or Mathematical/ finite element analysis micromirrors micro-optomechanical devices/ two-dimensional MOEMS scanning mirror deflection scanning device microoptical-electro-mechanical system vibration system stiffness scanning frequencies harmonic response stress distribution finite element method/ A4280A Optical lenses and mirrors A4283 Micro-optical devices and technology A0260 Numerical approximation and analysis B4145 Micro-optical devices and technology B0290T Finite element analysis
中文摘要	Two-dimensional scanning mirror is a new kind of deflection scanning device based on micro-optical-electro-mechanical system (MOEMS) technology, which has great advantages over the conventional scanning mechanisms with small volume, low power consumption and high scanning frequency. A two-dimensional MOEMS scanning mirror is presented and the dynamic model of the two degrees of freedom (DOF) vibration system is established. Equations of stiffnesses and scanning frequencies of the system are deduced, as well as the maximum deflection angles of the two DOF. The operational modes, harmonic response and stress distribution of the system are simulated using the finite element method and the results all meet the requirement of design. It is concluded that the design and modeling of the two-dimensional MOEMS scanning mirror are correct and effective.
语种	中文 ; 中文
出版者	Southeast University ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/24530]
专题	清华大学
推荐引用方式 GB/T 7714	Zhang Chi,Zhang Gao-fei,You Zheng. Modeling and simulation of two-dimensional MOEMS scanning mirror[J],2010, 2010.
APA	Zhang Chi,Zhang Gao-fei,&You Zheng.(2010).Modeling and simulation of two-dimensional MOEMS scanning mirror..
MLA	Zhang Chi,et al."Modeling and simulation of two-dimensional MOEMS scanning mirror".(2010).

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