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Researching the silicon direct wafer bonding with interfacial SiO2 layer 期刊论文
journal of semiconductors, 2016, 卷号: 37, 期号: 5, 页码: 056001
Wang Xiaoqing; Yu Yude; Ning Jin
收藏  |  浏览/下载:21/0  |  提交时间:2017/03/10
Wavelength-Tunable Si-Based InGaAs Resonant Cavity Enhanced Photodetectors Using Sol-Gel Wafer Bonding Technology 期刊论文
ieee photonics technology letters, 2011, 卷号: 23, 期号: 13, 页码: 881-883
作者:  Cao Q
收藏  |  浏览/下载:62/5  |  提交时间:2011/07/05
Characteristics of SOI rib waveguide microring and racetrack resonators 会议论文
5th ieee international conference on group iv photonics, sorrento, italy, sep 17-19, 2008
Huang, QZ; Xiao, X; Li, YT; Yu, YD; Yu, JZ
收藏  |  浏览/下载:61/0  |  提交时间:2010/03/09
Investigation of a chemically treated InP(100) surface during hydrophilic wafer bonding process 期刊论文
materials science and engineering b-solid state materials for advanced technology, 2006, 卷号: 128, 期号: 1-3, 页码: 93-97
作者:  Yu LJ
收藏  |  浏览/下载:66/0  |  提交时间:2010/04/11
Direct Wafer Bonding Technology employing vacuum-cavity pre-bonding 会议论文
conference on optoelectronic materials and devices, gwangju, south korea, sep 05-07, 2006
Yang GH (Yang Guohua); He GR (He Guorong); Zheng WH (Zheng Wanhua); Chen LH (Chen Lianghui)
收藏  |  浏览/下载:85/22  |  提交时间:2010/03/29
Optical properties of semiconductor quantum-well material using photonic crystal fabricated by micro-fabrication machine 期刊论文
acta physica sinica, 2006, 卷号: 55, 期号: 3, 页码: 1248-1252
Xu XS; Xiong ZG; Sun ZH; Du W; Lu L; Chen HD; Jin AZ; Zhang DZ
收藏  |  浏览/下载:81/0  |  提交时间:2010/04/11
Thermal stress analysis for GaInAsP multiple quantum well wafer chemically bonded to Si (100) 期刊论文
journal of applied physics, 2006, 卷号: 100, 期号: 2, 页码: art.no.023513
Zhao HQ (Zhao Hong-Quan); Yu LJ (Yu Li-Juan); Huang YZ (Huang Yong-Zhen)
收藏  |  浏览/下载:32/0  |  提交时间:2010/04/11
Strain analysis of InP/InGaAsP wafer bonded on Si by X-ray double crystalline diffraction 期刊论文
materials science and engineering b-solid state materials for advanced technology, 2006, 卷号: 133, 期号: 1-3, 页码: 117-123
Zhao HQ (Zhao Hong-Quan); Yu LJ (Yu Li-Juan); Huang YZ (Huang Yong-Zhen); Wang YT (Wang Yu-Tian)
收藏  |  浏览/下载:32/0  |  提交时间:2010/04/11
Fabrication of 1.55-mu m Si-based resonant cavity enhanced photodetectors using sol-gel bonding 期刊论文
ieee photonics technology letters, 2004, 卷号: 16, 期号: 8, 页码: 1930-1932
Mao RW; Li CB; Zuo YH; Cheng BW; Teng XG; Luo LP; Yu JZ; Wang QM
收藏  |  浏览/下载:273/9  |  提交时间:2010/03/09
Long-wavelength SiGe/Si MQW resonant-cavity-enhanced photodiodes (RCE-PD) 期刊论文
gettering and defect engineering in semiconductor technology, 2004, 卷号: 95-96, 期号: 0, 页码: 255-260
Yu JZ; Li C; Cheng BW; Wang QM
收藏  |  浏览/下载:54/16  |  提交时间:2010/03/09


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