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科研机构
半导体研究所 [19]
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期刊论文 [10]
会议论文 [9]
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2016 [1]
2011 [1]
2008 [1]
2006 [5]
2004 [3]
2003 [1]
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光电子学 [19]
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Researching the silicon direct wafer bonding with interfacial SiO2 layer
期刊论文
journal of semiconductors, 2016, 卷号: 37, 期号: 5, 页码: 056001
Wang Xiaoqing
;
Yu Yude
;
Ning Jin
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  |  
浏览/下载:21/0
  |  
提交时间:2017/03/10
Wavelength-Tunable Si-Based InGaAs Resonant Cavity Enhanced Photodetectors Using Sol-Gel Wafer Bonding Technology
期刊论文
ieee photonics technology letters, 2011, 卷号: 23, 期号: 13, 页码: 881-883
作者:
Cao Q
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  |  
浏览/下载:62/5
  |  
提交时间:2011/07/05
Resonant cavity enhanced (RCE) photodetector
silicon photonics
sol-gel wafer bonding
thermal tuning
INTERFACIAL ENERGY
SILICON-WAFERS
HIGH-SPEED
TEMPERATURE
PHOTODIODES
MORPHOLOGY
POWER
Characteristics of SOI rib waveguide microring and racetrack resonators
会议论文
5th ieee international conference on group iv photonics, sorrento, italy, sep 17-19, 2008
Huang, QZ
;
Xiao, X
;
Li, YT
;
Yu, YD
;
Yu, JZ
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  |  
浏览/下载:61/0
  |  
提交时间:2010/03/09
Resonators
submicron rib waveguides
silicon-on-insulator
electron beam lithography
Investigation of a chemically treated InP(100) surface during hydrophilic wafer bonding process
期刊论文
materials science and engineering b-solid state materials for advanced technology, 2006, 卷号: 128, 期号: 1-3, 页码: 93-97
作者:
Yu LJ
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  |  
浏览/下载:66/0
  |  
提交时间:2010/04/11
surface micro-roughness
contact angle
root-mean-square roughness
SILICON-WAFERS
ROUGHNESS
INP
Direct Wafer Bonding Technology employing vacuum-cavity pre-bonding
会议论文
conference on optoelectronic materials and devices, gwangju, south korea, sep 05-07, 2006
Yang GH (Yang Guohua)
;
He GR (He Guorong)
;
Zheng WH (Zheng Wanhua)
;
Chen LH (Chen Lianghui)
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  |  
浏览/下载:85/22
  |  
提交时间:2010/03/29
Optical properties of semiconductor quantum-well material using photonic crystal fabricated by micro-fabrication machine
期刊论文
acta physica sinica, 2006, 卷号: 55, 期号: 3, 页码: 1248-1252
Xu XS
;
Xiong ZG
;
Sun ZH
;
Du W
;
Lu L
;
Chen HD
;
Jin AZ
;
Zhang DZ
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  |  
浏览/下载:81/0
  |  
提交时间:2010/04/11
focused ion beam
electron beam lithography
photonic crystal
extraction efficiency
LIGHT EXTRACTION
SLAB
Thermal stress analysis for GaInAsP multiple quantum well wafer chemically bonded to Si (100)
期刊论文
journal of applied physics, 2006, 卷号: 100, 期号: 2, 页码: art.no.023513
Zhao HQ (Zhao Hong-Quan)
;
Yu LJ (Yu Li-Juan)
;
Huang YZ (Huang Yong-Zhen)
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  |  
浏览/下载:32/0
  |  
提交时间:2010/04/11
ACTIVATED BONDING METHOD
ROOM-TEMPERATURE
EPITAXIAL OVERGROWTHS
SURFACE
CRYSTAL
GAAS
TECHNOLOGY
ENERGY
FILMS
Strain analysis of InP/InGaAsP wafer bonded on Si by X-ray double crystalline diffraction
期刊论文
materials science and engineering b-solid state materials for advanced technology, 2006, 卷号: 133, 期号: 1-3, 页码: 117-123
Zhao HQ (Zhao Hong-Quan)
;
Yu LJ (Yu Li-Juan)
;
Huang YZ (Huang Yong-Zhen)
;
Wang YT (Wang Yu-Tian)
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  |  
浏览/下载:32/0
  |  
提交时间:2010/04/11
InP
Si
X-ray double crystalline diffraction
thermal strain
wafer bonding
OPTOELECTRONIC DEVICES
EPITAXIAL OVERGROWTHS
TEMPERATURE
INTERFACE
STRESSES
VCSELS
SURFACES
ENERGY
Fabrication of 1.55-mu m Si-based resonant cavity enhanced photodetectors using sol-gel bonding
期刊论文
ieee photonics technology letters, 2004, 卷号: 16, 期号: 8, 页码: 1930-1932
Mao RW
;
Li CB
;
Zuo YH
;
Cheng BW
;
Teng XG
;
Luo LP
;
Yu JZ
;
Wang QM
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  |  
浏览/下载:273/9
  |  
提交时间:2010/03/09
bonding medium
Long-wavelength SiGe/Si MQW resonant-cavity-enhanced photodiodes (RCE-PD)
期刊论文
gettering and defect engineering in semiconductor technology, 2004, 卷号: 95-96, 期号: 0, 页码: 255-260
Yu JZ
;
Li C
;
Cheng BW
;
Wang QM
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  |  
浏览/下载:54/16
  |  
提交时间:2010/03/09
DBR (distributed bragg reflector)
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