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浏览/检索结果: 共1条，第1-1条 帮助 限定条件 发表日期：2016     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Fine-pitch through-silicon via integration with self-aligned back-side benzocyclobutene passivation layer 期刊论文 MICRO & NANO LETTERS, 2016 Guan, Yong; Ma, Shenglin; Zeng, Qinghua; Chen, Jing; Jin, Yufeng 收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03 three-dimensional integrated circuits  passivation  organic compounds  sputter etching  chemical mechanical polishing  radiography  optical microscopy  scanning electron microscopy  vector network analyser  four probe electrical measurement  scanning electron microscopy  optical microscopy  X-ray radiographic testing  repeatability  chemical mechanical polishing  plasma etching  back side benzocyclobutene passivation layer  self aligned benzocyclobutene passivation layer  fine pitch thr