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CORC

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A method of fabricating vertical devices using a metal support film 专利
专利号: EP1502284B1, 申请日期: 2013-08-07, 公开日期: 2013-08-07
作者:  YOO, MYUNG, CHEOL
收藏  |  浏览/下载：12/0  |  提交时间：2019/12/24
Fabrication of GaN-based LEDs with 22 degrees undercut sidewalls by inductively coupled plasma reactive ion etching 期刊论文
CHINESE PHYSICS B, 2013, 卷号: 22, 期号: 10
Wang, B; Su, SC; He, M; Chen, H; Wu, WB; Zhang, WW; Wang, Q; Chen, YL; Gao, Y; Zhang, L; Zhu, KB; Lei, Y
收藏  |  浏览/下载：15/0  |  提交时间：2014/01/16
Self-Cleaning Poly(dimethylsiloxane) Film with Functional Micro/Nano Hierarchical Structures 期刊论文
langmuir, 2013
Zhang, Xiao-Sheng; Zhu, Fu-Yun; Han, Meng-Di; Sun, Xu-Ming; Peng, Xu-Hua; Zhang, Hai-Xia
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/10
A MEMS sandwich differential capacitive silicon-on-insulator accelerometer 期刊论文
microsystem technologies micro and nanosystems information storage and processing systems, 2013
Zhang, Yangxi; Yang, Gang; Gao, Chengchen; Hao, Yilong
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/10
A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices 期刊论文
science china technological sciences, 2013
Yang ZhenChuan; Wei YuMin; Mao Xu; Yan GuiZhen
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/10
SINGLE-STEP FABRICATION OF SUPERHYDROPHOBIC MICRO/NANO DUAL-SCALE PDMS FILM REPLICATED FROM ULTRA-LOW-SURFACE-ENERGY MOLD 其他
2013-01-01
Zhang, Xiao-Sheng; Jin, Bai-Hong; Chu, Shi-Gan; Peter, Nicolas; Zhu, Fu-Yun; Zhang, Hai-Xia
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/16
High aspect ratio etching of nanopores in PECVD SiC through AAO mask 其他
2013-01-01
Wu, Songmei; Bammatter, Marc-Oliver; Tang, Wei; Auzelyte, Vaida; Zhang, Haixia; Brugger, Juergen
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/16
Superhydrophobic Micro/Nano Dual-Scale Structures 期刊论文
journal of nanoscience and nanotechnology, 2013
Zhang, Xiaosheng; Di, Qianli; Zhu, Fuyun; Sun, Guangyi; Zhang, Haixia
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13
Superhydrophobic micro/nano dual-scale structures 其他
2013-01-01
Zhang, Xiaosheng; Di, Qianli; Zhu, Fuyun; Sun, Guangyi; Zhang, Haixia
收藏  |  浏览/下载：2/0  |  提交时间：2017/12/03
In-situ measurement of ion angular distribution in bulk titanium DRIE for modeling the etch profile 其他
2013-01-01
Hu, Jia; He, Shuwei; Zhang, Yiming; Chen, Jing
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13
IAD  SU-8  overhang  stiction  DRIE  model  

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