Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy

doi:10.1364/OE.26.002944

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微电子装备总体研究室（四室）

	Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy
	Xie, Zhongye 1,2; Tang, Yan 1; Zhou, Yi 1,2; Deng, Qinyuan 1,2
刊名	OPTICS EXPRESS
	2018-02-05
卷号	26 期号:3 页码:2944-2953
关键词	Digital devices Film thickness Interferometry Modulation Thickness measurement
ISSN号	1094-4087
DOI	10.1364/OE.26.002944
文献子类	J
英文摘要	In this research, an approach called modulation-based structured-illumination microscopy (MSIM) is proposed to measure the surface and thickness profile of thin film layers. With this method, a sinusoidal fringe pattern generated by digital micro-mirror devices (DMD) is projected on the sample. The modulation estimation of the reflected patterns is implemented for characterizing the surface and thickness profile of the sample. The measurement system is relatively simple and only an ordinary objective is enough to achieve imaging of the sample. In addition, the reflected signals that come from the back surface of the film create less disturbance to the front surface as compared with white-light interferometry. Consequently, they can be easily distinguished and achieve a successful measurement precisely. Both simulation and experiments are carried out to demonstrate the availability of this MISM method. The results are in excellent agreement with a commercial stage profiler and the relative uncertainty is less than 10 nm. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
WOS关键词	PROFILE MEASUREMENT ; SCANNING INTERFEROMETRY ; LIGHT ; ELLIPSOMETRY
语种	英语
WOS记录号	WOS:000425365900071
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9339]
专题	光电技术研究所_微电子装备总体研究室（四室）
作者单位	1.State Key Laboratory of Optical Technologies for Micro-fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan; 610209, China; 2.University of Chinese, Academy of Sciences, Beijing; 100049, China
推荐引用方式 GB/T 7714	Xie, Zhongye,Tang, Yan,Zhou, Yi,et al. Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy[J]. OPTICS EXPRESS,2018,26(3):2944-2953.
APA	Xie, Zhongye,Tang, Yan,Zhou, Yi,&Deng, Qinyuan.(2018).Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy.OPTICS EXPRESS,26(3),2944-2953.
MLA	Xie, Zhongye,et al."Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy".OPTICS EXPRESS 26.3(2018):2944-2953.