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A low-noise SC-type interface asic for a closed-loop MEMS gyroscope 其他
2014-01-01
Liu, Mingxing; Lu, Wengao; Tao, Tingting; Chu, Hai; Li, Xiaoliang; Chen, Zhongjian; Zhang, Yacong; Yan, Guizhen
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/13
1 x 8 MEMS FLEXIBLE INTEGRATED OPTICAL DEVICE FOR OPTICAL FIBER-BASED NETWORKING APPLICATIONS 期刊论文
microwave and optical technology letters, 2013
Chen, Qinghua; Chen, Yingjun; Wu, Wengang; Li, Yanmei; Li, Li; Yan, Guizhen; Hao, Yilong
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/12
Etiologic Diagnosis of Lower Respiratory Tract Bacterial Infections Using Sputum Samples and Quantitative Loop-Mediated Isothermal Amplification 其他
2012-01-01
Kang, Yu; Deng, Rui; Wang, Can; Deng, Tao; Peng, Peichao; Cheng, Xiaoxing; Wang, Guoqing; Qian, Minping; Gao, Huafang; Han, Bei; Chen, Yusheng; Hu, Yinghui; Geng, Rong; Hu, Chengping; Zhang, Wei; Yang, Jingping; Wan, Huanying; Yu, Qin; Wei, Liping; Li, Jiashu; Tian, Guizhen; Wang, Qiuyue; Hu, Ke; Wang, Siqin; Wang, Ruiqin; Du, Juan; He, Bei; Ma, Jianjun; Zhong, Xiaoning; Mu, Lan; Cai, Shaoxi; Zhu, Xiangdong; Xing, Wanli; Yu, Jun; Deng, Minghua; Gao, Zhancheng
收藏  |  浏览/下载：6/0  |  提交时间：2015/11/13
An Improved Method to Remove Anti-Footing Al Layer after DRIE 其他
2009-01-01
Li, Yuan; Yang, Zhenchuan; Yan, Guizhen
收藏  |  浏览/下载：7/0  |  提交时间：2015/11/10
The method of prevent footing effect in making SOl micro-mechanical structure 其他
2009-01-01
Mao, Xu; Yang, Zhenchuan; Li, Zhihong; Yan, Guizhen
收藏  |  浏览/下载：1/0  |  提交时间：2015/11/10
The Method of Prevent Footing Effect in Making SOI Micro-mechanical Structure 其他
2009-01-01
Mao, Xu; Yang, Zhenchuan; Li, Zhihong; Yan, Guizhen
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/13
Fabrication of micromechanical double-layer fixed-fixed beams on pyrex glass 其他
2007-01-01
Zhang, Le; Sun, Li' Yu, Tingting; Zhang, Lu; Yan, Guizhen; na
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/13
Electroless copper plating applicable for bulk-silicon micromachined radio frequency inductor 期刊论文
固体薄膜, 2006
Han, Xiang; Wu, Wengang; Li, Yi; Li, Zhihong; Hao, Yilong; Yan, Guizhen
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/12
Electroless copper and nickel plating on single-crystal silicon for MEMS applications 期刊论文
pan tao ti hsueh paochinese journal of semiconductors, 2005
Han, Xiang; Li, Yi; Wu, Wengang; Yan, Guizhen; Hao, Yilong
收藏  |  浏览/下载：1/0  |  提交时间：2015/11/13
Fabrication and characterization of tunneling current of anodic bonded dry-etched MEMS tunneling accelerometer 期刊论文
pan tao ti hsueh paochinese journal of semiconductors, 2004
Dong, Haifeng; Hao, Yilong; Jia, Yubin; Yan, Guizhen; Wang, Ying; Li, Ting
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/16

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