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Large area deep subwavelength interference lithography with a 35 nm half-period based on bulk plasmon polaritons 期刊论文
OPTICAL MATERIALS EXPRESS, 2018, 卷号: 8, 期号: 2, 页码: 199-209
作者:  Liu, Hongchao;  Luo, Yunfei;  Kong, Weijie;  Liu, Kaipeng;  Du, Wenjuan
收藏  |  浏览/下载:43/0  |  提交时间:2019/08/23


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