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Sputtering gas pressure and target power dependence on the microstructure and properties of DC-magnetron sputtered AlB2-type WB2 films 期刊论文
JOURNAL OF ALLOYS AND COMPOUNDS, 2017, 卷号: 703, 页码: 188-197
Liu, Y. M.; Han, R. Q.; Liu, F.; Pei, Z. L.; Sun, C.
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