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CORC

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TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer 期刊论文
MICROELECTRONIC ENGINEERING, 2012, 卷号: 91, 页码: 167-173
Wei, CZ; Zhou, W; Wang, Q; Xia, XY; Li, XX
收藏  |  浏览/下载：26/0  |  提交时间：2013/04/23
Isotropic Silicon Etching With XeF2 Gas for Wafer-Level Micromachining Applications 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 卷号: 21, 期号: 6, 页码: 1436-1444
Xu, DH; Xiong, B; Wu, GQ; Wang, YC; Sun, X; Wang, YL
收藏  |  浏览/下载：10/0  |  提交时间：2013/04/23
Monolithic Integration of Pressure Plus Acceleration Composite TPMS Sensors With a Single-Sided Micromachining Technology 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 卷号: 21, 期号: 2, 页码: 284-293
Wang, JC; Xia, XY; Li, XX
收藏  |  浏览/下载：27/0  |  提交时间：2013/04/23
Uncooled Thermoelectric Infrared Sensor With Advanced Micromachining 期刊论文
IEEE SENSORS JOURNAL, 2012, 卷号: 12, 期号: 6, 页码: -
Xu, DH; Xiong, B; Wu, GQ; Ma, YL; Wang, YL
收藏  |  浏览/下载：15/0  |  提交时间：2013/04/23
On-chip integration of acceleration, pressure, and temperature composite sensor with a single-sided micromachining technique 期刊论文
Journal of Microelectromechanical Systems., 2011, 卷号: 20, 期号: 1, 页码: 42-52
Wang, Quan; Li,XX; Li,T; Bao, Minhang; Zhou, Wei
收藏  |  浏览/下载：9/0  |  提交时间：2012/08/23
A single-wafer-based single-sided bulk-micromachining technique for high-yield and low-cost volume production of pressure sensors 期刊论文
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, 期号: 0, 页码: 410-413
Wang, Jiachou; Li, XX
收藏  |  浏览/下载：11/0  |  提交时间：2012/08/23
On-chip integration of acceleration, pressure, and temperature composite sensor with a single-sided micromachining technique 期刊论文
Journal of Microelectromechanical Systems., 2011, 卷号: 20, 期号: 1, 页码: 42-52
Wang, Quan; Li,XX; Li,T; Bao, Minhang; Zhou, Wei
收藏  |  浏览/下载：9/0  |  提交时间：2012/08/23
Improved micromachining of all SU-8 3D structures for a biologically-inspired flying robot 期刊论文
MICROELECTRONIC ENGINEERING, 2011, 卷号: 88, 期号: 8, 页码: 2218-2224
Bao, XQ（包晓晴）; Dargent, T; Grondel, S; Paquet, JB; Cattan, E
收藏  |  浏览/下载：11/0  |  提交时间：2012/04/12
On-Chip Integration of Acceleration, Pressure, and Temperature Composite Sensor With a Single-Sided Micromachining Technique 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2011, 卷号: 20, 期号: 1, 页码: 42-52
Wang,QA; Li,XX; Li,T; Bao,MH; Zhou,W
收藏  |  浏览/下载：13/0  |  提交时间：2012/04/12
A SINGLE-WAFER-BASED SINGLE-SIDED BULK-MICROMACHINING TECHNIQUE FOR HIGH-YIELD AND LOW-COST VOLUME PRODUCTION OF PRESSURE SENSORS 会议论文
Transducers’11:The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, 2011
Jiachou Wang and Xinxin Li
收藏  |  浏览/下载：20/0  |  提交时间：2012/05/04

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