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Experimental study on electro-osmosis grouting reinforcement of scaling off earthen sites 期刊论文
Yanshilixue Yu Gongcheng Xuebao/Chinese Journal of Rock Mechanics and Engineering, 2021, 卷号: 40, 期号: 2, 页码: 390-398
作者:  Cui, Kai;  Cheng, Fuqiang;  Chen, Wenwu;  Ma, Qixin;  Xu, Pengfei
收藏  |  浏览/下载:13/0  |  提交时间:2021/04/12
Investigation of Evolution Processes of Wafer Profiles With Edge Over Erosion in Copper CMP 期刊论文
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2017, 卷号: 30, 期号: 1, 页码: 69-77
作者:  Wu, Lixiao;  Hahn, Sookap;  Yan, Changfeng
收藏  |  浏览/下载:7/0  |  提交时间:2019/11/15
Investigation of evolution processes of wafer profiles with edge over erosion in copper CMP 期刊论文
IEEE Transactions on Semiconductor Manufacturing, 2017, 卷号: 30, 期号: 1, 页码: 69-77
作者:  Wu, Lixiao;  Hahn, Sookap;  Yan, Changfeng
收藏  |  浏览/下载:14/0  |  提交时间:2020/11/14
Modeling of evolution process of edge over erosion in copper CMP using frequency components algorithm 会议论文
Shanghai, China, March 13, 2016 - March 14, 2016
作者:  Wu, Lixiao;  Hahn, Sookap;  Yan, Changfeng
收藏  |  浏览/下载:2/0  |  提交时间:2020/11/15
MODELING OF EVOLUTION PROCESS OF EDGE OVER EROSION IN COPPER CMP USING FREQUENCY COMPONENTS ALGORITHM 会议论文
作者:  Wu, Lixiao;  Hahn, Sookap;  Yan, Changfeng
收藏  |  浏览/下载:4/0  |  提交时间:2019/11/15
Effects of Polishing Parameters on Evolution of Different Wafer Patterns During Cu CMP 期刊论文
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2015, 卷号: 28, 期号: 1, 页码: 106-116
作者:  Wu, Lixiao;  Yan, Changfeng
收藏  |  浏览/下载:8/0  |  提交时间:2019/11/15
Effects of polishing parameters on evolution of different wafer patterns during Cu CMP 期刊论文
IEEE Transactions on Semiconductor Manufacturing, 2015, 卷号: 28, 期号: 1, 页码: 106-116
作者:  Wu, Lixiao;  Yan, Changfeng
收藏  |  浏览/下载:0/0  |  提交时间:2020/11/14


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