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科研机构
兰州理工大学 [7]
内容类型
期刊论文 [5]
会议论文 [2]
发表日期
2021 [1]
2017 [2]
2016 [2]
2015 [2]
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Experimental study on electro-osmosis grouting reinforcement of scaling off earthen sites
期刊论文
Yanshilixue Yu Gongcheng Xuebao/Chinese Journal of Rock Mechanics and Engineering, 2021, 卷号: 40, 期号: 2, 页码: 390-398
作者:
Cui, Kai
;
Cheng, Fuqiang
;
Chen, Wenwu
;
Ma, Qixin
;
Xu, Pengfei
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2021/04/12
Concrete construction
Disintegration
Electroosmosis
Energy utilization
Grouting
Mortar
Silicates
Sodium compounds
Soil testing
Soils
Electrode layout
Grouting reinforcements
Penetration resistances
Penetration test
Regular hexagon
Reinforced soil
Sodium silicate solutions
Structure characteristic
Investigation of Evolution Processes of Wafer Profiles With Edge Over Erosion in Copper CMP
期刊论文
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2017, 卷号: 30, 期号: 1, 页码: 69-77
作者:
Wu, Lixiao
;
Hahn, Sookap
;
Yan, Changfeng
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2019/11/15
Wafer profiles
edge over erosion
copper CMP
Investigation of evolution processes of wafer profiles with edge over erosion in copper CMP
期刊论文
IEEE Transactions on Semiconductor Manufacturing, 2017, 卷号: 30, 期号: 1, 页码: 69-77
作者:
Wu, Lixiao
;
Hahn, Sookap
;
Yan, Changfeng
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2020/11/14
Copper
Linear systems
Polishing
Textile printing
Copper CMP
Evolution process
Frequency components
Pattern density
Pattern structure
Polishing parameters
Polishing time
Wafer profiles
Modeling of evolution process of edge over erosion in copper CMP using frequency components algorithm
会议论文
Shanghai, China, March 13, 2016 - March 14, 2016
作者:
Wu, Lixiao
;
Hahn, Sookap
;
Yan, Changfeng
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2020/11/15
Copper
Linear systems
Polishing
Semiconductor device manufacture
Silicon wafers
Textile printing
Copper CMP
Evolution process
Frequency components
Pattern density
Pattern structure
Polishing processs
Square waves
Wafer patterns
MODELING OF EVOLUTION PROCESS OF EDGE OVER EROSION IN COPPER CMP USING FREQUENCY COMPONENTS ALGORITHM
会议论文
作者:
Wu, Lixiao
;
Hahn, Sookap
;
Yan, Changfeng
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/11/15
Effects of Polishing Parameters on Evolution of Different Wafer Patterns During Cu CMP
期刊论文
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2015, 卷号: 28, 期号: 1, 页码: 106-116
作者:
Wu, Lixiao
;
Yan, Changfeng
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2019/11/15
Polishing parameters
wafer patterns
chemical mechanical polishing (CMP)
linear system
contact pressure
Effects of polishing parameters on evolution of different wafer patterns during Cu CMP
期刊论文
IEEE Transactions on Semiconductor Manufacturing, 2015, 卷号: 28, 期号: 1, 页码: 106-116
作者:
Wu, Lixiao
;
Yan, Changfeng
收藏
  |  
浏览/下载:0/0
  |  
提交时间:2020/11/14
Copper
Elastic moduli
Erosion
Linear systems
Polishing
Topography
Chemical mechanical polishing(CMP)
Contact pressures
High selectivity
Polishing parameters
Polishing processs
Preston coefficients
Selectivity ratio
Wafer patterns
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