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Copper-nickel-molybdenum alloy thin film for integrated circuits comprises nickel as solution element, molybdenum as diffusion barrier element, and copper, where nickel and molybdenum are co-doped with copper and exhibit specific enthalpies. 专利
申请日期: 2013-01-01, 公开日期: 2013-05-30
作者:  LI X ZHANG X ZHU J WANG Q DONG C
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