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Effect of roughness of substrate and sputtering power on the properties of TiN coatings deposited by magnetron sputtering for ATF 期刊论文
Journal of Nuclear Materials, 2018, 卷号: 509, 页码: 542-549
作者:  Xiao, Weiwei*;  Deng, Hua*;  Zou, Shuliang;  Ren, Yuhong;  Tang, Dewen
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