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Study on the anti-reflection and structure evolution of hydrogenated amorphous carbon grown by plasma chemical vapor deposition 期刊论文
Surface and interface analysis, 2014, 卷号: 46, 期号: 8, 页码: 530-534
作者:  Shi J(师晶);  Geng ZR(耿中荣);  Zhang JY(张俊彦);  Wang CB(王成兵)
收藏  |  浏览/下载:21/0  |  提交时间:2014/10/17


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