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Real-time Measurement of Full Field Retardation Near Quarter Wavelength (vol 16, pg 457, 2012) 期刊论文
j. opt. soc. korea., 2013, 卷号: 17, 期号: 1, 页码: 110
作者:  Liu, Longhai;  Zeng, Aijun;  Yuan, Qiao;  Zhu, Linglin;  Fang, Ruifang
收藏  |  浏览/下载:40/0  |  提交时间:2016/11/28
Design of zoom system for pupil shaping of lithography tool 会议论文
international conference on optical instruments and technology - optical systems and modern optoelectronic instruments
作者:  Fang, Ruifang;  Zeng, Aijun;  Zhang, Shanhua;  Huang, Huijie
收藏  |  浏览/下载:18/0  |  提交时间:2016/11/28
Design and simulation of illuminator with micro scanning slit array for NA 0.75 lithography system 会议论文
conference on optical microlithography xxvi
作者:  Zhu, Linglin;  Zeng, Aijun;  Zhang, Shanhua;  Fang, Ruifang;  Huang, Huijie
收藏  |  浏览/下载:12/0  |  提交时间:2016/11/28
Simultaneous measurement of retardation and fast axis angle of eighth-wave plate in real time 期刊论文
optics communications, 2012, 期号: 24
Ruifang Fang; Aijun Zeng; Linglin Zhu; Longhai Liu; Huijie Huang
收藏  |  浏览/下载:14/0  |  提交时间:2013/09/12
Real-time Measurement of Full Field Retardation near Quarter Wavelength 期刊论文
journal of the optical society of korea, 2012, 期号: 4
Longhai Liu; Aijun Zeng; Qiao Yuan; Linglin Zhu; Ruifang Fang; Huijie Huang
收藏  |  浏览/下载:12/0  |  提交时间:2013/09/12
Real-time measurement of retardation of eighth-wave plate independent of fast-axis direction 期刊论文
chinese optics letters, 2012, 卷号: 10, 期号: 9
Ruifang Fang; Aijun Zeng; Longhai Liu; Linglin Zhu; Huijie Huang
收藏  |  浏览/下载:14/0  |  提交时间:2013/09/12


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