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Study of image motion compensation in spectral imaging system 期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2016, 卷号: 9682, 页码: 968217
作者:  Li, Zhijun;  Chen, Xing Long
收藏  |  浏览/下载:20/0  |  提交时间:2018/06/14
Superlens imaging lithography for high aspect ratio sub-wavelength pattern employing trilayer resist process 期刊论文
MICROELECTRONIC ENGINEERING, 2013, 卷号: 110, 页码: 35-39
作者:  Fang, Liang;  Pan, Li;  Wang, Changtao;  Luo, Xiangang
收藏  |  浏览/下载:8/0  |  提交时间:2015/04/17
Superlens imaging lithography for high aspect ratio sub-wavelength pattern employing trilayer resist process 期刊论文
Microelectronic Engineering, 2013, 卷号: 110, 页码: 35-39
作者:  Fang, Liang;  Pan, Li;  Wang, Changtao;  Luo, Xiangang
收藏  |  浏览/下载:9/0  |  提交时间:2016/11/22


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