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浏览/检索结果: 共5条，第1-5条 帮助 限定条件 专题：大连理工大学    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 A mixed elastohydrodynamic lubrication model for simulation of chemical mechanical polishing with double-layer structure of polishing pad 期刊论文 INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2015, 卷号: 77, 页码: 107-116 作者:  Zhou, Ping;  Dong, Zhigang;  Kang, Renke;  Jin, Zhuji;  Guo, Dongming 收藏  |  浏览/下载：5/0  |  提交时间：2019/12/09 Chemical mechanical polishing  Elastohydrodynamic lubrication  Multi-layered elastic theory  Wafer  Material removal rate   A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing 期刊论文 INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2013, 卷号: 69, 页码: 1009-1016 作者:  Zhou, Ping;  Guo, Dongming;  Kang, Renke;  Jin, Zhuji 收藏  |  浏览/下载：1/0  |  提交时间：2019/12/11 Chemical mechanical polishing  Elastohydrodynamic lubrication  Layered elastic theory  Wafer  Material removal rate   Simulation of cmp process based on mixed elastohydrodynamic lubrication model with layered elastic theory 期刊论文 Advanced Materials Research, 2012, 卷号: 565, 页码: 330-335 作者:  Zhou, P.;  Kang, R.;  Jin, Z.;  Guo, D. 收藏  |  浏览/下载：2/0  |  提交时间：2019/12/13 Chemical mechanical polishing  Elastohydrodynamic Lubrication  Layered elastic theory  Rough surface  Contact mechanic   Simulation of CMP Process Based on Mixed Elastohydrodynamic Lubrication Model with 会议论文 15th International Symposium on Advances in Abrasive Technology 作者:  Zhou P(周平);  Kang RK(康仁科);  Jin ZJ(金洙吉);  Guo DM(郭东明) 收藏  |  浏览/下载：4/0  |  提交时间：2019/12/18 Low friction and high load support capacity of slider bearing with a mixed slip surface 期刊论文 JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 2006, 卷号: 128, 页码: 904-907 作者:  Wu, C. W.;  Ma, G. J.;  Zhou, P.;  Wu, C. D. 收藏  |  浏览/下载：2/0  |  提交时间：2019/12/27 wall slip  lubrication  low friction