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Effect of post oxidation annealing in nitric oxide on interface properties of 4H-SiC/SiO2after high temperature oxidation 期刊论文
Journal of Semiconductors, 2015, 卷号: 36, 期号: 9
作者:  Li, Yanyue;  Deng, Xiaochuan;  Liu, Yunfeng;  Zhao, Yanli;  Li, Chengzhan
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